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Serial cosputtering of metals: Modelling of sputtering from a periodically codeposited surface
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1993 (English)In: Surface and Coatings Technology, Vol. 61, 287-292 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1993. Vol. 61, 287-292 p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258514OAI: oai:DiVA.org:uu-258514DiVA: diva2:841862
Conference
ICMCTF-93, San Diego, USA
Available from: 2015-07-15 Created: 2015-07-15 Last updated: 2015-07-15

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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Language
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