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The evolution of atomic scale topography by sputtering erosion
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1993 (English)In: Surface and Interface Analysis, ISSN 0142-2421, E-ISSN 1096-9918, Vol. 20, p. 90-94Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1993. Vol. 20, p. 90-94
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258516OAI: oai:DiVA.org:uu-258516DiVA, id: diva2:841865
Available from: 2015-07-15 Created: 2015-07-15 Last updated: 2017-12-04

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