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Preferential sputtering of silicon from metal silicides at elevated temperatures
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1993 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258530OAI: oai:DiVA.org:uu-258530DiVA: diva2:841885
40th International SYmposium of the American Vacuum Society, Orlando, FL, USA
Available from: 2015-07-15 Created: 2015-07-15 Last updated: 2015-07-15

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