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Anisotropically wet-etched structures in silicon used in various sensor designs at Uppsala University
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1994 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258596OAI: oai:DiVA.org:uu-258596DiVA: diva2:841985
2nd European Workshop on electrochemical processing of semiconductors, Amsterdam, Nederländerna
Available from: 2015-07-16 Created: 2015-07-16 Last updated: 2015-07-16

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