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Anisotropically wet-etched structures in silicon used in various sensor designs at Uppsala University
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1994 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
1994.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258596OAI: oai:DiVA.org:uu-258596DiVA: diva2:841985
Conference
2nd European Workshop on electrochemical processing of semiconductors, Amsterdam, Nederländerna
Available from: 2015-07-16 Created: 2015-07-16 Last updated: 2015-07-16

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CiteExportLink to record
Permanent link

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Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
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