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Activation of Sb in ultra-shallow poly-silicon emitters using rapid thermal processing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1991 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
1991. Vol. 224, 317-322 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258654OAI: oai:DiVA.org:uu-258654DiVA: diva2:842180
Mat Res Society Symposium
Available from: 2015-07-17 Created: 2015-07-17 Last updated: 2015-07-17

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