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Low pressure rf plasma jet - a new tool for surface processing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1992 (English)In: Surface and coatings Technology, Vol. 54-55, 91-95 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1992. Vol. 54-55, 91-95 p.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258672OAI: oai:DiVA.org:uu-258672DiVA: diva2:842230
Conference
ICMCTF-92, San Diego, CA, USA
Available from: 2015-07-17 Created: 2015-07-17 Last updated: 2015-07-17

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CiteExportLink to record
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  • apa
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