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A suggested mechanism for silicon direct bonding from studying hydrophilic and hydrophobic surfaces
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1992 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 2, 158-160 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1992. Vol. 2, 158-160 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258675OAI: oai:DiVA.org:uu-258675DiVA: diva2:842244
MME-92, Leuven, Belgien
Available from: 2015-07-17 Created: 2015-07-17 Last updated: 2015-07-17

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