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Enhanced sputtering of one species in the processing of multielement thin films
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1992 (English)In: Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, ISSN 0734-2101, E-ISSN 1520-8559, Vol. 10, no 4, 1765- p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1992. Vol. 10, no 4, 1765- p.
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Engineering and Technology
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URN: urn:nbn:se:uu:diva-258680OAI: oai:DiVA.org:uu-258680DiVA: diva2:842251
Available from: 2015-07-17 Created: 2015-07-17 Last updated: 2017-12-04

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