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RBS of germanium nitride films deposited by  supersonic rf plasma jet
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1992 (English)Conference paper (Refereed)
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258690OAI: oai:DiVA.org:uu-258690DiVA: diva2:842265
9th symp elementary processes and chem reactions in low Temp plasma, Tjeckoslovakien
Available from: 2015-07-17 Created: 2015-07-17 Last updated: 2015-07-17

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