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Micromachined optical planes and reflectors in silicon
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
1994 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, Vol. 41-42, no 1-3, 330-333 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1994. Vol. 41-42, no 1-3, 330-333 p.
National Category
Engineering and Technology
URN: urn:nbn:se:uu:diva-258696OAI: oai:DiVA.org:uu-258696DiVA: diva2:842271
Eurosensors-93, Budapest
Available from: 2015-07-17 Created: 2015-07-17 Last updated: 2015-07-17

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