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Electrical characterization of thin Ta2O5 films
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2001 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2001.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258882OAI: oai:DiVA.org:uu-258882DiVA: diva2:842561
Conference
19th Nordic semiconductor meeting, Köpenhamn, Danmark
Available from: 2015-07-21 Created: 2015-07-21 Last updated: 2015-07-21

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CiteExportLink to record
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Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
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Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
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Output format
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