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Space qualification of direct bonded silicon microsystems
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2000 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
2000.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-258883OAI: oai:DiVA.org:uu-258883DiVA: diva2:842563
Conference
Micro nano Technology for Space Applications, Pasadena, CA, USA
Available from: 2015-07-21 Created: 2015-07-21 Last updated: 2015-07-21

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