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Geometrically defined all-diamond abrasive surfaces for pad conditioning in chemical mechanical polishing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2005 (English)In: Journal of the Electrochemical Society, ISSN 0013-4651, Vol. 153, no 1, G1-G6 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2005. Vol. 153, no 1, G1-G6 p.
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Engineering and Technology
URN: urn:nbn:se:uu:diva-258886OAI: oai:DiVA.org:uu-258886DiVA: diva2:842580
Available from: 2015-07-21 Created: 2015-07-21 Last updated: 2015-07-21

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