Magnetized hollow cathode activated magnetron
2015 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 107, no 15, 153501Article in journal (Refereed) Published
Planar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conventional magnetrons at the same power. The developed arrangements enhance sputtering from the magnetron target by the high-density hollow cathode plasma and increase the number of sputtered/evaporated species. Results of the test experiments of these arrangements on a commercial planar magnetron with the Ti target are presented and their capabilities discussed.
Place, publisher, year, edition, pages
2015. Vol. 107, no 15, 153501
Physical Sciences Engineering and Technology
IdentifiersURN: urn:nbn:se:uu:diva-267221DOI: 10.1063/1.4933091ISI: 000363424000050OAI: oai:DiVA.org:uu-267221DiVA: diva2:872452