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Magnetized hollow cathode activated magnetron
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity. BB Plasma Design AB, SE-75643 Uppsala, Sweden..
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electricity. BB Plasma Design AB, SE-75643 Uppsala, Sweden..
BB Plasma Design AB, SE-75643 Uppsala, Sweden..
2015 (English)In: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 107, no 15, 153501Article in journal (Refereed) Published
Abstract [en]

Planar magnetron in which the target is coupled with a magnetized hollow cathode is presented. Detailed principles of such arrangements are explained. The hollow cathode activated magnetron produces intense and stable plasmas in a wider interval of the working gas pressures as compared to the conventional magnetrons at the same power. The developed arrangements enhance sputtering from the magnetron target by the high-density hollow cathode plasma and increase the number of sputtered/evaporated species. Results of the test experiments of these arrangements on a commercial planar magnetron with the Ti target are presented and their capabilities discussed.

Place, publisher, year, edition, pages
2015. Vol. 107, no 15, 153501
National Category
Physical Sciences Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-267221DOI: 10.1063/1.4933091ISI: 000363424000050OAI: oai:DiVA.org:uu-267221DiVA: diva2:872452
Available from: 2015-11-19 Created: 2015-11-19 Last updated: 2017-12-01Bibliographically approved

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Barankova, HanaBardos, Ladislav

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