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Trigate Device with Full Silicided Epi-less Source/Drain for High Density Access Transistor Applications
IBM research.
IBM research.
IBM Research.
2015 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
2015.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-268372OAI: oai:DiVA.org:uu-268372DiVA: diva2:876627
Available from: 2015-12-04 Created: 2015-12-04 Last updated: 2015-12-04

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CiteExportLink to record
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