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TECHNIQUES TO FORM UNIFORM AND STABLE SILICIDE
IBM Watson Research Center.
2015 (English)Patent (Other (popular science, discussion, etc.))
Place, publisher, year, edition, pages
2015.
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-268376OAI: oai:DiVA.org:uu-268376DiVA: diva2:876634
Available from: 2015-12-04 Created: 2015-12-04 Last updated: 2015-12-04

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
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