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Depth-Resolved X-ray Absorption Spectroscopy by Means of Grazing Emission X-ray Fluorescence
Paul Scherrer Inst, CH-5232 Villigen, Switzerland..
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Physical Chemistry. Polish Acad Sci, Inst Phys Chem, PL-01224 Warsaw, Poland..
Paul Scherrer Inst, CH-5232 Villigen, Switzerland.;Jan Kochanowski Univ Humanities & Sci, Inst Phys, PL-25406 Kielce, Poland..
2015 (English)In: Analytical Chemistry, ISSN 0003-2700, E-ISSN 1520-6882, Vol. 87, no 21, 10815-10821 p.Article in journal (Refereed) Published
Abstract [en]

Grazing emission X-ray fluorescence (GEXRF) is well suited for nondestructive elemental-sensitive depth-profiling measurements on samples with nanometer-sized features. By varying the grazing emission angle under which the X-ray fluorescence signal is detected, the probed depth range can be tuned from a few to several hundred nanometers. The dependence of the XRF intensity on the grazing emission angle can be assessed in a sequence of measurements or in a scanning-free approach using a position-sensitive area detector. Hereafter, we will show that the combination of scanning-free GEXRF and fluorescence detected X-ray absorption spectroscopy (XAS) allows for depth-resolved chemical speciation measurements with nanometer-scale accuracy. While the conventional grazing emission geometry is advantageous to minimize self-absorption effects, the use of a scanning-free setup makes the sequential scanning of the grazing emission angles obsolete and paves the way toward time-resolved depth-sensitive XAS measurements. The presented experimental approach was applied to study the surface oxidation of an Fe layer on the top of bulk Si and of a Ge bulk sample. Thanks to the penetrating properties and the insensitivity toward the electric conduction properties of the incident and emitted X-rays, the presented experimental approach is well suited for in situ sample surface studies in the nanometer regime.

Place, publisher, year, edition, pages
2015. Vol. 87, no 21, 10815-10821 p.
National Category
Physical Chemistry Analytical Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-268407DOI: 10.1021/acs.analchem.5b03346ISI: 000364354900026PubMedID: 26458105OAI: oai:DiVA.org:uu-268407DiVA: diva2:878475
Available from: 2015-12-09 Created: 2015-12-04 Last updated: 2017-12-01Bibliographically approved

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