uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Resistive graphene humidity sensors with rapid and direct electrical readout
KTH Royal Inst Technol, Dept EKT, Sch Informat & Commun Technol, SE-16440 Kista, Sweden..
KTH Royal Inst Technol, Dept Mat & Nano Phys, Sch Informat & Commun Technol, SE-16440 Kista, Sweden..
KTH Royal Inst Technol, Dept Micro & Nano Syst, Sch Elect Engn, SE-10044 Stockholm, Sweden..
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Materials Theory. KTH Royal Inst Technol, Dept Mat & Nano Phys, Sch Informat & Commun Technol, SE-16440 Kista, Sweden.;KTH Royal Inst Technol, SeRC Swedish E Sci Res Ctr, SE-10044 Stockholm, Sweden..
Show others and affiliations
2015 (English)In: Nanoscale, ISSN 2040-3364, E-ISSN 2040-3372, Vol. 7, no 45, 19099-19109 p.Article in journal (Refereed) Published
Resource type
Text
Abstract [en]

We demonstrate humidity sensing using a change of the electrical resistance of single-layer chemical vapor deposited (CVD) graphene that is placed on top of a SiO2 layer on a Si wafer. To investigate the selectivity of the sensor towards the most common constituents in air, its signal response was characterized individually for water vapor (H2O), nitrogen (N-2), oxygen (O-2), and argon (Ar). In order to assess the humidity sensing effect for a range from 1% relative humidity (RH) to 96% RH, the devices were characterized both in a vacuum chamber and in a humidity chamber at atmospheric pressure. The measured response and recovery times of the graphene humidity sensors are on the order of several hundred milliseconds. Density functional theory simulations are employed to further investigate the sensitivity of the graphene devices towards water vapor. The interaction between the electrostatic dipole moment of the water and the impurity bands in the SiO(2)d substrate leads to electrostatic doping of the graphene layer. The proposed graphene sensor provides rapid response direct electrical readout and is compatible with back end of the line (BEOL) integration on top of CMOS-based integrated circuits.

Place, publisher, year, edition, pages
2015. Vol. 7, no 45, 19099-19109 p.
National Category
Nano Technology Other Physics Topics Other Chemistry Topics
Identifiers
URN: urn:nbn:se:uu:diva-270649DOI: 10.1039/c5nr06038aISI: 000364852500035PubMedID: 26523705OAI: oai:DiVA.org:uu-270649DiVA: diva2:890207
Funder
EU, European Research Council, 307311EU, European Research Council, 277879Swedish Research Council, E0616001Swedish Research Council, D0575901German Research Foundation (DFG), LE 2440/1-1Göran Gustafsson Foundation for promotion of scientific research at Uppala University and Royal Institute of TechnologySwedish Research CouncilThe Royal Swedish Academy of SciencesKnut and Alice Wallenberg FoundationCarl Tryggers foundation Swedish Energy AgencySwedish Foundation for Strategic Research
Available from: 2016-01-01 Created: 2016-01-01 Last updated: 2017-12-01Bibliographically approved

Open Access in DiVA

fulltext(4567 kB)214 downloads
File information
File name FULLTEXT01.pdfFile size 4567 kBChecksum SHA-512
bec811a2277ea1bf30d54ce8a289c2c7c1240a650d6a6bea9111d2135863dd76095cd6cc09489ec9f8b693d955003ac8408f9306d95625b3d49a1c32744a1110
Type fulltextMimetype application/pdf

Other links

Publisher's full textPubMed

Authority records BETA

Delin, AnnaBergqvist, Lars

Search in DiVA

By author/editor
Delin, AnnaBergqvist, Lars
By organisation
Materials Theory
In the same journal
Nanoscale
Nano TechnologyOther Physics TopicsOther Chemistry Topics

Search outside of DiVA

GoogleGoogle Scholar
Total: 214 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

doi
pubmed
urn-nbn

Altmetric score

doi
pubmed
urn-nbn
Total: 666 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf