An APT investigation of an amorphous Cr-B-C thin film
2015 (English)In: Ultramicroscopy, ISSN 0304-3991, E-ISSN 1879-2723, Vol. 159, 217-222 p.Article in journal (Refereed) PublishedText
A magnetron sputtered amorphous Cr-B-C thin film was investigated by means of atom probe tomography (APT). The film is constituted of two phases; a Cr-rich phase present as a few nanometer large regions embedded in a Cr-poor phase (tissue phase). The Cr-rich regions form columnar chains oriented parallel to the growth direction of the film. It was found that the Cr-rich regions have a higher B:C ratio than the Cr-poor regions. The composition of the phases was determined as approximately 35Cr-33B-30C and 15Cr-40B-42C (at%), respectively. The results suggest that this type of nanocomposite films has a more complex structure than previously anticipated, which may have an importance for the mechanical and electrical properties.
Place, publisher, year, edition, pages
2015. Vol. 159, 217-222 p.
Atom probe tomography, Thin film, Boride, Cr-B-C, Nanocomposite, Carbon, Metall carbo-boride
IdentifiersURN: urn:nbn:se:uu:diva-272142DOI: 10.1016/j.ultramic.2015.01.001ISI: 000366220100013PubMedID: 25667171OAI: oai:DiVA.org:uu-272142DiVA: diva2:893104
FunderSwedish Foundation for Strategic Research , RMA11-0029