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Mechanical considerations in the design of high-precision surface micromachined devices
Uppsala University.
1998 (English)Other (Other scientific)
Place, publisher, year, pages
Uppsala : Acta Universitatis Upsaliensis : Univ.-bibl. , 1998.
Series
Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology ; 409, ISSN 91-554-4343-5
Identifiers
URN: urn:nbn:se:uu:diva-62101OAI: oai:DiVA.org:uu-62101DiVA: diva2:90012
Available from: 2008-10-17 Created: 2008-10-17

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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Language
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Output format
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