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Surface modification of SU-8 for metal/SU-8 adhesion using RF plasma treatment for application in thermopile detectors
Mid Sweden Univ, Dept Elect Design, Sundsvall, Sweden..
Mid Sweden Univ, Dept Elect Design, Sundsvall, Sweden..
Helmholtz Zentrum, Inst Methods & Instrumentat Synchrotron Radiat Re, Berlin, Germany..
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Molecular and condensed matter physics.
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2015 (English)In: MATERIALS RESEARCH EXPRESS, ISSN 2053-1591, Vol. 2, no 8, 086501Article in journal (Refereed) PublishedText
Abstract [en]

This article reports on plasma treatment of SU-8 epoxy in order to enhance adhesive strength for metals. Its samples were fabricated on standard silicon wafers and treated with (O-2 and Ar) RF plasma at a power of 25 W at a low pressure of (3 x 10(-3) Torr) for different time spans (10-70 s). The sample surfaces were characterized in terms of contact angle, surface (roughness and chemistry) and using a tape test. During the contact angle measurement, it was observed that the contact angle was reduced from 73 degrees to 5 degrees (almost wet) and 23 degrees for (O-2 and Ar) treated samples, respectively. The root mean square surface roughness was significantly increased by 21.5% and 37.2% for (O-2 and Ar) treatment, respectively. A pattern of metal squares was formed on the samples using photolithography for a tape test. An adhesive tape was applied to the samples and peeled off at 180 degrees The maximum adhesion results, more than 90%, were achieved for the O-2-treated samples, whereas the Ar-treated samples showed no change. The XPS study shows the formation of new species in the O-2-treated sample compared to the Ar-treated samples. The high adhesive results were due to the formation of hydrophilic groups and new O-2 species in the O-2-treated samples, which were absent in Ar-treated samples.

Place, publisher, year, edition, pages
2015. Vol. 2, no 8, 086501
Keyword [en]
SU-8, contact angle, plasma treatment, surface modification, adhesion, tape test, theromocouples
National Category
Fusion, Plasma and Space Physics
URN: urn:nbn:se:uu:diva-280967DOI: 10.1088/2053-1591/2/8/086501ISI: 000370037800017OAI: oai:DiVA.org:uu-280967DiVA: diva2:912432
Available from: 2016-03-16 Created: 2016-03-16 Last updated: 2016-04-01Bibliographically approved

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Lindblad, Andreas
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Molecular and condensed matter physics
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