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Micro- and Nanomanipulation for Nanomanufacturing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2014 (English)In: Encyclopedia of Nanotechnology / [ed] Bhushan, Bharat, springer , 2014, 1-17 p.Chapter in book (Refereed)Text
Place, publisher, year, edition, pages
springer , 2014. 1-17 p.
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Nano Technology
URN: urn:nbn:se:uu:diva-283464DOI: 10.1007/978-94-007-6178-0_100923-1ISBN: 978-94-007-6178-0OAI: oai:DiVA.org:uu-283464DiVA: diva2:919175
Available from: 2016-04-13 Created: 2016-04-13 Last updated: 2016-04-19

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Publisher's full texthttp://dx.doi.org/10.1007/978-94-007-6178-0_100923-1

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