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Transfer of micro-optical structures into semiconductor materials by use of inductively coupled plasma dry etching
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Chalmers University of Technology, Sweden.
Chalmers University of Technology, Sweden.
2000 (English)Conference paper, Poster (with or without abstract) (Refereed)
Place, publisher, year, edition, pages
2000. 102-104 p.
National Category
Atom and Molecular Physics and Optics
Identifiers
URN: urn:nbn:se:uu:diva-284272OAI: oai:DiVA.org:uu-284272DiVA: diva2:920110
Conference
Northern Optics 2000 and EOSAM 2000, Swedish Optical Society, June 6-8, 2000, Uppsala, Sweden
Available from: 2016-04-16 Created: 2016-04-16 Last updated: 2016-04-20

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Karlsson, MikaelNikolajeff, Fredrik

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