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InP based Micro Opto Electro Mechanics
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
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1998 (English)Conference paper, Poster (with or without abstract) (Refereed)
Place, publisher, year, edition, pages
1998.
National Category
Nano Technology
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URN: urn:nbn:se:uu:diva-284273OAI: oai:DiVA.org:uu-284273DiVA: diva2:920111
Conference
3rd Micro Structure Workshop, March 24-25, 1998, Uppsala, Sweden
Available from: 2016-04-16 Created: 2016-04-16 Last updated: 2016-04-20

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Karlsson, MikaelHjort, Klas

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