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Atomic layer deposition of TiO2 for reversibly switchable hydrophobic surfaces
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2013 (English)In: 24th Micromachine Europe, 2013, P32- p.Conference paper, Poster (Other academic)
Place, publisher, year, edition, pages
2013. P32- p.
National Category
Engineering and Technology
Research subject
Engineering Science with specialization in Microsystems Technology
URN: urn:nbn:se:uu:diva-284870OAI: oai:DiVA.org:uu-284870DiVA: diva2:920924
24th Micromachine Europe (MME 2013, Sept. 1-3, 2013, Helsinki, Finland
Available from: 2016-04-19 Created: 2016-04-19 Last updated: 2016-04-21

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