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Gas flow sputtering of Cu(In,Ga)Se-2 for thin film solar cells
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2015 (English)In: 2015 IEEE 42ND PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2015Conference paper, Published paper (Refereed)
Resource type
Text
Abstract [en]

Gas flow sputtering of Cu(In,Ga)Se-2 (CIGS) from two opposing Cu(In,Ga)Se-2 targets with slightly Cu-poor stoichiometry was performed, using i) selenium only provided by the target and ii) using additional selenium from an elemental source inside the sputtering system. In both cases the composition of the sputtered CIGS film was similar to the target. A sputter process without additional selenium supply led to poor cell results at about 2 % efficiency. After introducing a posttreatment in selenium atmosphere immediately after the sputter deposition, the cell results were dramatically improved to 12 %. With selenium added during the sputtering process, 13.7 % conversion efficiency was obtained without any post treatment. Gas flow sputtering uses a high gas flow to transport the material from the plasma to the growing film, thereby the atoms will be thermalized, similarly to in an evaporation process. Reactant gases can be supplied close to the substrate, outside the plasma, thereby reducing the risk for sputter damage.

Place, publisher, year, edition, pages
2015.
Series
IEEE Photovoltaic Specialists Conference, ISSN 0160-8371
Keyword [en]
Cu(In, Ga)Se-2, CIGS, gas flow sputtering, GFS, selenium
National Category
Energy Systems
Identifiers
URN: urn:nbn:se:uu:diva-284902ISI: 000369992902115ISBN: 978-1-4799-7944-8 (print)OAI: oai:DiVA.org:uu-284902DiVA: diva2:920993
Conference
IEEE 42nd Photovoltaic Specialist Conference (PVSC), JUN 14-19, 2015, New Orleans, LA
Available from: 2016-04-19 Created: 2016-04-19 Last updated: 2016-04-22Bibliographically approved

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Edoff, MarikaLindahl, JohanWätjen, TimoNyberg, Tomas

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