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A 60 GHz silicon micromachined cavity resonator with integrated tuning MEMS array
IMEC/SSET, B-3001 Leuven, Belgium; UCL/EMIC, B-1348 Louvain-la-Neuve, Belgium. (Microwave group)ORCID iD: 0000-0002-2217-8032
Number of Authors: 12
2009 (English)Conference paper, Oral presentation with published abstract (Refereed)
Place, publisher, year, edition, pages
2009.
National Category
Embedded Systems
Identifiers
URN: urn:nbn:se:uu:diva-289130OAI: oai:DiVA.org:uu-289130DiVA: diva2:924752
Conference
10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE'09, Trento, Italy 6-7, pp. 27-30, July
Available from: 2016-04-29 Created: 2016-04-29 Last updated: 2016-05-03

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CiteExportLink to record
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Citation style
  • apa
  • ieee
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Language
  • de-DE
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