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A 60 GHz silicon micromachined cavity resonator with integrated tuning MEMS array
IMEC/SSET, B-3001 Leuven, Belgium; UCL/EMIC, B-1348 Louvain-la-Neuve, Belgium. (Microwave group)ORCID iD: 0000-0002-2217-8032
Number of Authors: 12
2009 (English)Conference paper, Abstract (Refereed)
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Embedded Systems
URN: urn:nbn:se:uu:diva-289130OAI: oai:DiVA.org:uu-289130DiVA: diva2:924752
10th International Symposium on RF MEMS and RF Microsystems, MEMSWAVE'09, Trento, Italy 6-7, pp. 27-30, July
Available from: 2016-04-29 Created: 2016-04-29 Last updated: 2016-05-03

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Dancila, Dragos
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