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Architectured columns with a metal-dielectric periodic nanostructure
Univ Franche Comte, Inst FEMTO ST, UMR 6174, CNRS,ENSMM,UTBM, 15B Ave Montboucons, F-25030 Besancon, France..
Univ Bourgogne, CNRS, UMR 6303, ICB Lab Interdisciplinaire Carnot Bourgogne, 9 Ave Alain Savary, F-21078 Dijon, France..
Univ Bourgogne, CNRS, UMR 6303, ICB Lab Interdisciplinaire Carnot Bourgogne, 9 Ave Alain Savary, F-21078 Dijon, France..
Univ Bourgogne, CNRS, UMR 6303, ICB Lab Interdisciplinaire Carnot Bourgogne, 9 Ave Alain Savary, F-21078 Dijon, France..
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2016 (English)In: Materials letters (General ed.), ISSN 0167-577X, E-ISSN 1873-4979, Vol. 172, 128-131 p.Article in journal (Refereed) PublishedText
Abstract [en]

We engineer a sputter deposited metal/oxide periodic structure based on W and Ta, and corresponding oxides with tuneable alternations from a few nanometers to a few tens nanometers, combined with the preparation of inclined, zigzag and spiral columns. This work shows how bi-component periodic multilayers can be produced within some inclined nano-columns exhibiting oriented, zigzag and helix structures. This unique combination of controlled columnar structure and periodic multilayers enables new opportunities to create some unusual structural designs for functional materials.

Place, publisher, year, edition, pages
2016. Vol. 172, 128-131 p.
Keyword [en]
Deposition, Sputtering, Multilayer structure, Thin films
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:uu:diva-292983DOI: 10.1016/j.matlet.2016.02.161ISI: 000373288500033OAI: oai:DiVA.org:uu-292983DiVA: diva2:927426
Available from: 2016-05-12 Created: 2016-05-11 Last updated: 2016-05-12Bibliographically approved

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Nyberg, Tomas
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Solid State Electronics
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