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Interaction of silicides with dopants
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
2009 (English)Conference paper, Published paper (Refereed)
Place, publisher, year, edition, pages
2009.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-295377OAI: oai:DiVA.org:uu-295377DiVA: diva2:933530
Conference
Intl. Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling (INSIGHT-2009), Napa, California, USA
Available from: 2016-06-06 Created: 2016-06-06 Last updated: 2016-06-06

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CiteExportLink to record
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Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
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Language
  • de-DE
  • en-GB
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  • fi-FI
  • nn-NO
  • nn-NB
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Output format
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