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Crystallization of amorphous silicon on glass substrate by microwave annealing for thin-film-transistor applications
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2015 (English)Conference paper (Refereed)
Place, publisher, year, edition, pages
2015.
National Category
Other Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:uu:diva-295380OAI: oai:DiVA.org:uu-295380DiVA: diva2:933535
Conference
15th International Workshop on Junction Technology, Kyoto, Japan
Available from: 2016-06-06 Created: 2016-06-06 Last updated: 2016-06-06

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