Manufacturing and characterizationof a ceramic single-use microvalve
2016 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 26, no 9, 095002-095011 p.Article in journal (Refereed) Published
We present the manufacturing and characterization of a ceramic single-use microvalve withthe potential to be integrated in lab-on-a-chip devices, and forsee its utilization in space andother demanding applications. A 3 mm diameter membrane was used as the flow barrier, andthe opening mechanism was based on cracking the membrane by inducing thermal stresses onit with fast and localized resistive heating.Four manufacturing schemes based on high-temperature co-fired ceramic technology werestudied. Three designs for the integrated heaters and two thicknesses of 40 and 120 μmfor the membranes were considered, and the heat distribution over their membranes, therequired heating energies, their opening mode, and the flows admitted through were compared.Furthermore, the effect of applying +1 and −1 bar pressure difference on the membraneduring cracking was investigated. Thick membranes demonstrated unpromising results forlow-pressure applications since the heating either resulted in microcracks or cracking of thewhole chip. Because of the higher pressure tolerance of the thick membranes, the designwith microcracks can be considered for high-pressure applications where flow is facilitatedanyway. Thin membranes, on the other hand, showed different opening sizes depending onheater design and, consequently, heat distribution over the membranes, from microcracks toholes with sizes of 3–100% of the membrane area. For all the designs, applying +1 bar overpressure contributed to bigger openings, whereas −1 bar pressure difference only did so forone of the designs, resulting in smaller openings for the other two. The energy required forbreaking these membranes was a few hundred mJ with no significant dependence on designand applied pressure. The maximum sustainable pressure of the valve for the current designand thin membranes was 7 bar.
Place, publisher, year, edition, pages
Institute of Physics (IOP), 2016. Vol. 26, no 9, 095002-095011 p.
single-use valve, HTCC, alumina, platinum
Engineering and Technology Materials Engineering
IdentifiersURN: urn:nbn:se:uu:diva-298806DOI: 10.1088/0960-1317/26/9/095002OAI: oai:DiVA.org:uu-298806DiVA: diva2:947449