uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Ion transmission and characterization of ordered nanoporous alumina
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Technology, Department of Engineering Sciences, Ion Physics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. jonfysik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Technology, Department of Engineering Sciences, Ion Physics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. jonfysik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science. Technology, Department of Engineering Sciences, Ion Physics. Chemistry, Department of Materials Chemistry, Inorganic Chemistry. oorganisk kemi.
Show others and affiliations
2004 (English)In: Nuclear Instruments and Methods Physics Research, Vol. B, no 222, 593-600 p.Article in journal (Refereed) Published
Abstract [en]

Ordered nanoporous alumina samples with a pore diameter of 70 nm, an array period of 100 nm and several thicknesses were considered as possible masks for pattern transfer by MeV ion lithography. A simple procedure for the sample alignment using a 2 MeV He+ beam was utilized. The energy distributions of transmitted ions as well as backscattering spectra were studied in aligned and non-aligned orientations. The best transmission, comparable to the relative surface area covered by pores, was reached for 2 um thick samples and was independent on ion species. Although the transmission for thicker mambranes was generally lower, it significantly depended on the quality of each individual sample. The presented ion beam technique can therefore be used as a tool for the characterization of porous materails. The acceptance angle for transmission through pores and the effective atomic density of samples can be obtained from the experimental data and it is shown that nanoporous alumina can be used as a mask for MeV ion lithography.

Place, publisher, year, edition, pages
2004. Vol. B, no 222, 593-600 p.
Keyword [en]
nanomaterials, anodic alumina, RBS, Transmission, characterization, ion lithogrphy, pattern transfer
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-67010OAI: oai:DiVA.org:uu-67010DiVA: diva2:94921
Available from: 2006-03-21 Created: 2006-03-21 Last updated: 2011-01-12

Open Access in DiVA

No full text

Authority records BETA

Possnert, GöranJohansson, AndersHjort, Klas

Search in DiVA

By author/editor
Possnert, GöranJohansson, AndersHjort, Klas
By organisation
Department of Engineering SciencesMaterials ScienceIon PhysicsInorganic Chemistry
Inorganic Chemistry

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 357 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf