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Sputter-Deposited Indium-Tin Oxide Thin Films for Acetaldehyde Gas Sensing
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
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2016 (English)In: Coatings, ISSN 2079-6412, Vol. 6, no 2, 19Article in journal (Refereed) Published
Resource type
Text
Abstract [en]

Reactive dual-target DC magnetron sputtering was used to prepare In-Sn oxide thin films with a wide range of compositions. The films were subjected to annealing post-treatment at 400 degrees C or 500 degrees C for different periods of time. Compositional and structural characterizations were performed by X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, X-ray diffraction, Rutherford backscattering and scanning electron microscopy. Films were investigated for gas sensing at 200 degrees C by measuring their resistance response upon exposure to acetaldehyde mixed with synthetic air. We found that the relative indium-to-tin content was very important and that measurable sensor responses could be recorded at acetaldehyde concentrations down to 200 ppb, with small resistance drift between repeated exposures, for both crystalline SnO2-like films and for amorphous films consisting of about equal amounts of In and Sn. We also demonstrated that it is not possible to prepare crystalline sensors with intermediate indium-to-tin compositions by sputter deposition and post-annealing up to 500 degrees C.

Place, publisher, year, edition, pages
2016. Vol. 6, no 2, 19
Keyword [en]
indium tin oxide, magnetron sputtering, gas sensor, acetaldehyde
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:uu:diva-299731DOI: 10.3390/coatings6020019ISI: 000378428700006OAI: oai:DiVA.org:uu-299731DiVA: diva2:949989
Funder
EU, FP7, Seventh Framework Programme, 267234
Available from: 2016-07-26 Created: 2016-07-26 Last updated: 2017-11-28Bibliographically approved
In thesis
1. Thin films for indoor air monitoring: Measurements of Volatile Organic Compounds
Open this publication in new window or tab >>Thin films for indoor air monitoring: Measurements of Volatile Organic Compounds
2016 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Volatile organic compounds (VOCs) in the indoor air have adverse effects on the dwellers residing in a building or a vehicle. One of these effects is called sick building syndrome (SBS). SBS refers to situations in which the users of a building develop acute health effects and discomfort depending on the time they spend inside some buildings without having any specific illness. Furthermore, monitoring volatile organic compounds could lead to early diagnosis of specific illnesses through breath analysis. Among those VOCs formaldehyde, acetaldehyde can be listed.

In this thesis, VOC detecting thin film sensors have been investigated. Such sensors have been manufactured using semiconducting metal oxides, ligand activated gold nanoparticles and Graphene/TiO2 mixtures. Advanced gas deposition unit, have been used to produce NiO thin films and Au nanoparticles. DC magnetron sputtering has been used to produce InSnO and VO2 thin film sensors. Graphene/TiO2 sensors have been manufactured using doctor-blading.

While presenting the results, first, material characterization details are presented for each sensor, then, gas sensing results are presented. Morphologies, crystalline structures and chemical properties have been analyzed using scanning electron microscopy, X-ray diffraction and X-ray photo electron spectroscopy. Furthermore, more detailed analyses have been performed on NiO samples using extended X-ray absorption fine structure method and N2 adsorption measurements. Gas sensing measurements were focused on monitoring formaldehyde and acetaldehyde. However, responses ethanol and methane were measured in some cases to monitor selectivity. Graphene/TiO2 samples were used to monitor NO2 and NH3. For NiO thin film sensors and Au nano particles, fluctuation enhanced gas sensing is also presented in addition to conductometric measurements. 

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2016. 78 p.
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 1422
Keyword
gas sensor, thin film, adcanced gas depostion, sputter deposition, nickel oxide, gold nanoparticles, indium tin oxide, acetaldehyde, formaldehyde
National Category
Nano Technology
Identifiers
urn:nbn:se:uu:diva-302558 (URN)978-91-554-9683-8 (ISBN)
Public defence
2016-10-21, Room Å2001, Ångströmlaboratoriet, Lägerhyddsv 1, 13:15 (English)
Opponent
Supervisors
Funder
EU, FP7, Seventh Framework Programme, 267234
Available from: 2016-09-28 Created: 2016-09-06 Last updated: 2016-10-14Bibliographically approved

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Cindemir, UmutLansåker, Pia C.Österlund, LarsNiklasson, Gunnar A.Granqvist, Claes-Göran

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