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Composition, structure, and dielectric tunability of epitaxial SrTiO3 thin films grown by radio frequency magnetron sputtering
Uppsala University.
Uppsala University.
Uppsala University.
Uppsala University.
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1999 (English)In: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, ISSN 0734-2101, Vol. 17, no 2, 564-570 p.Article in journal (Other scientific) Published
Abstract [en]

Epitaxial (001) oriented SrTiO3 films have been deposited on LaAlO3(001) substrates by off-axis radio frequency magnetron sputtering in Ar:O-2 gas mixtures at substrate temperatures ranging from 650 to 850 degrees C. For the deposition conditions used, st

Place, publisher, year, edition, pages
AMER INST PHYSICS , 1999. Vol. 17, no 2, 564-570 p.
Keyword [en]
INTERDIGITAL CAPACITORS; STRONTIUM-TITANATE; SIMULATION; DEPOSITION; LAALO3; TEMPERATURES
Identifiers
URN: urn:nbn:se:uu:diva-67660OAI: oai:DiVA.org:uu-67660DiVA: diva2:95571
Note
Addresses: Wang X, Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden. Linkoping Univ, Dept Phys, S-58183 Linkoping, Sweden. FOA Def Res Estab, S-58111 Linkoping, Sweden. Uppsala Univ, Dept Phys, S-75163 Uppsala, Sweden.Available from: 2008-10-17 Created: 2008-10-17 Last updated: 2011-01-14

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