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Fundamental understanding and modeling of reactive sputtering process
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2005 (English)In: Thin Solid Films, Vol. 476, no 2, 215-230 p.Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2005. Vol. 476, no 2, 215-230 p.
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URN: urn:nbn:se:uu:diva-68201OAI: oai:DiVA.org:uu-68201DiVA: diva2:96112
Available from: 2005-03-10 Created: 2005-03-10 Last updated: 2011-01-12

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Berg, SörenNyberg, Tomas

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