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High Density Plasma PVD of CrN Films
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences, Electronics. Fasta tillståndets elektronik.
2004 (English)In: 6th Symp European Vacuum Coaters, September 2004, Rome-Anzio, Italy, 2004, Invited paper- p.Conference paper, Published paper (Other scientific)
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2004. Invited paper- p.
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URN: urn:nbn:se:uu:diva-68454OAI: oai:DiVA.org:uu-68454DiVA: diva2:96365
Available from: 2005-05-04 Created: 2005-05-04

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Barankova, HanaBardos, Ladislav

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