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Thermomechanical Properties and Performance of Ceramic Resonators for Wireless Pressure Reading in High Temperatures
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. (ÅSTC)
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.ORCID iD: 0000-0003-2445-4624
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
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2015 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, no 9, 095016Article in journal (Refereed) Published
Abstract [en]

This paper reports on the design, fabrication and thermomechanical study of ceramic LC resonators for wireless pressure reading, verified at room temperature, at 500 °C and at 1000 °C for pressures up to 2.5 bar. Five different devices were fabricated of high-temperature co-fired ceramics (HTCC) and characterized. Alumina green tape sheets were screen printed with platinum paste, micromachined, laminated and fired. The resulting samples were 21 x 19 mm2 with different thicknesses. An embedded communicator part was integrated with either a passive backing part or with a pressure-sensing element, including an 80 μm thick and 6 mm diameter diaphragm. The study includes measuring thermally and mechanically induced resonance frequency shifts, and thermally induced deformations. For the pressure sensor device, contributions from changes in the relative permittivity and from expanding air, trapped in the cavity, were extracted. The devices exhibited thermomechanical robustness during heating, regardless of the thickness of the backing. The pressure sensitivity decreased with increasing temperature from 15 050 ppm/bar at room temperature to 2400 ppm/bar at 1000°C, due to the decreasing pressure difference between the external pressure and the air pressure inside the cavity. 

Place, publisher, year, edition, pages
2015. Vol. 25, no 9, 095016
Keyword [en]
Wireless Reading, HTCC, Pressure sensing, Harsh Environments, Thermomechanical properties
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-302870OAI: oai:DiVA.org:uu-302870DiVA: diva2:968122
Funder
Knut and Alice Wallenberg Foundation
Available from: 2016-09-12 Created: 2016-09-12 Last updated: 2016-09-12

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Sturesson, PeterKhaji, ZahraKnaust, StefanKlintberg, LenaThornell, Greger
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