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Design, manufacturing and evaluationof high pressure microfluidic chips with integrated corona discharge electrodes
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2016 (English)Independent thesis Advanced level (professional degree), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

In this thesis possibilities of generating corona discharges in supercritical carbon

dioxide inside a micro fabricated glass chip are investigated. Managing to do so would

enable high throughput research of new chemical reaction fields and analytical

spectrometry in the supercritical phase with low equipment costs compared to

available technology used today. The aims of the thesis were to design, manufacture

and test a chip of this kind that can withstand pressures of 125 bar and be used to

study corona discharges by investigating how pressure, electrode geometry and

interelectrode distance can affect operating voltages and if light emission from corona

discharges could be captured from outside the chip. Chips were successfully

manufactured using standard cleanroom techniques like lithography, wet etching,

sputter deposition and fusion bonding. Testing showed that one electrode design was

superior to the others in terms of operation stability, corona current and light

emission and that interelectrode distance of 2 um and 3 um seem preferable

compared to larger distances. Electrode erosion during operation proved to be a big

problem for electrode lifetime and measurement repeatability and must therefore be

improved for further development.

Place, publisher, year, edition, pages
UPTEC Q, ISSN 1401-5773 ; 16019
National Category
Natural Sciences Engineering and Technology
URN: urn:nbn:se:uu:diva-303305OAI: oai:DiVA.org:uu-303305DiVA: diva2:971296
Educational program
Master Programme in Materials Engineering
Available from: 2016-09-16 Created: 2016-09-15 Last updated: 2016-09-16Bibliographically approved

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