uu.seUppsala University Publications
Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Design, manufacturing and evaluationof high pressure microfluidic chips with integrated corona discharge electrodes
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
2016 (English)Independent thesis Advanced level (professional degree), 20 credits / 30 HE creditsStudent thesis
Abstract [en]

In this thesis possibilities of generating corona discharges in supercritical carbon dioxide inside a micro fabricated glass chip are investigated. Managing to do so would enable high throughput research of new chemical reaction fields and analytical spectrometry in the supercritical phase with low equipment costs compared to available technology used today. The aims of the thesis were to design, manufacture and test a chip of this kind that can withstand pressures of 125 bar and be used to study corona discharges by investigating how pressure, electrode geometry and interelectrode distance can affect operating voltages and if light emission from corona discharges could be captured from outside the chip. Chips were successfully manufactured using standard cleanroom techniques like lithography, wet etching, sputter deposition and fusion bonding. Testing showed that one electrode design was superior to the others in terms of operation stability, corona current and light emission and that interelectrode distance of 2 um and 3 um seem preferable compared to larger distances. Electrode erosion during operation proved to be a big problem for electrode lifetime and measurement repeatability and must therefore be improved for further development.

Place, publisher, year, edition, pages
2016.
Series
UPTEC Q, ISSN 1401-5773 ; 16019
National Category
Natural Sciences Engineering and Technology
Identifiers
URN: urn:nbn:se:uu:diva-303305OAI: oai:DiVA.org:uu-303305DiVA: diva2:971296
Educational program
Master Programme in Materials Engineering
Supervisors
Examiners
Available from: 2016-09-16 Created: 2016-09-15 Last updated: 2016-12-14Bibliographically approved

Open Access in DiVA

fulltext(2315 kB)162 downloads
File information
File name FULLTEXT01.pdfFile size 2315 kBChecksum SHA-512
b37e63a7965ba3a259e3d73775a98a2641326f63f8af6d91a7ef303c161af867f3a7ca58d5baabbf645562885cbb825e21f2c75264b2112a087a0b6cc103814f
Type fulltextMimetype application/pdf

By organisation
Microsystems Technology
Natural SciencesEngineering and Technology

Search outside of DiVA

GoogleGoogle Scholar
Total: 162 downloads
The number of downloads is the sum of all downloads of full texts. It may include eg previous versions that are now no longer available

urn-nbn

Altmetric score

urn-nbn
Total: 493 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf