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  • 1. Bakke, T
    et al.
    Köhler, Johan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Mukherjee, S
    Silicon semi-circular tapered structures made by diffusion limited HF:HNO3 wet etching1998In: Micromechanics Europe 1988, MME'98, Ulvik Norge, 1998Conference paper (Refereed)
  • 2.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Micromachining in Silicon for Passive Alignment of Optical Fibres2000In: Micro-Opto-Electro-Mechanical Systems, 22-23 May, Glasgow, Scotland, United Kingdom, Proc. of SPIE Vol. 4075, 2000, p. 118-Conference paper (Refereed)
  • 3.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Micromechanics in optical microsystems - with focus on telecom systems1997In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 7, no 3, p. 93-98Article in journal (Refereed)
    Abstract [en]

    As micromachining in semiconductor materials is known to be precise with micrometre or even submicrometre dimension control, it is well suited for building optical microsystems. In this paper the potentials for microstructure technologies (MSTs) are prese

  • 4.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Micromechanics in optical microsystems - with focus on telecom systems1996In: MME´96, Barcelona, Spain, Oct 21-22, 1996Conference paper (Refereed)
  • 5.
    Bäcklund, Ylva
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hjort, Klas
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Materialvetenskap. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Johansson, Stefan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Materialvetenskap. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Stenmark, Lars
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Micro sculpturing - Somewhat new materials and micromachining methods to meet new applications1999In: Eurosensors -99, 1999Conference paper (Other academic)
  • 6.
    Bäcklund, Ylva
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Vangbo, Mattias
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Rangsten, Pelle
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Wet etching of single crystal quartz1998In: Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998Conference paper (Refereed)
  • 7. de Bree, H-E
    et al.
    Leussink, P
    Korthurst, T
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Jansen, H
    The wheatstone GADGET, a simple circuit for measuring differential resistance variations1995In: Proc fo the 6th Micromachined Europé Workshop MME´95, Copenhagen, Denmark, Sept 3-5, 1995Conference paper (Refereed)
  • 8.
    Hagman, Björn
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Richard, Åse
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Anodic bonding of materials with large difference in thermal expansion2000In: MME'00 (Micro Mechanics Europe), October 1-3, Uppsala, Sweden, 2000Conference paper (Refereed)
  • 9.
    Hedlund, Christer
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Katardjiev, Ilia
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Berg, Sören
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Blom, Hans-Olof
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    A method for the determination of the angular dependence during dry etching1995In: The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995Conference paper (Refereed)
  • 10.
    Hedlund, Christer
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Katardjiev, Ilia
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Berg, Sören
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Blom, Hans-Olof
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    A Method for the Determination of the Angular Dependence during Dry Etching1996In: Journal of Vacuum Science & Technology B, ISSN 1071-1023, E-ISSN 1520-8567, Vol. 14, no 5, p. 3239-Article in journal (Refereed)
  • 11.
    Jönsson, Mats
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Aldaeus, F
    Johansson, L E
    Lindberg, Ulf
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hamp, S
    Jonsson, G
    Roeraade, J
    Bäcklund, Ylva
    A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis2004In: Micro Structure Workshop, 29-31 March, Ystad, Sweden, 2004Conference paper (Other academic)
  • 12.
    Jönsson, Mats
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences.
    Aldaeus, Fredrik
    Johansson, LarsErik
    Lindberg, Ulf
    Hamp, Sven
    Jonsson, Gunnar
    Roeraade, Johan
    Bäcklund, Ylva
    A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis2004In: Proceedings of the fifth Micro Structure Workshop, p. 65-69Article in journal (Refereed)
  • 13.
    Köhler, J
    et al.
    MATERIAL SCIENCE / ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science.
    Bäcklund, Ylva
    Stenamrk, L
    Backe, T
    Muhkerjee, S
    Cold Gas Thrusters Micromachined in silicon-Design Plan1997In: 2nd Round Table on Micro-Nano Technologies for Space, ESTEC, Noordwijk, The Nederlands, 15-17 October, 1997, 1997Conference paper (Refereed)
  • 14.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Stenmark, Lars
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Backe, T
    Muhkerjee, S
    Cold Gas thrusters Micromachined in silicon - Design plan1997In: 2nd Round Table on Micro-Nano Technologies for space, ESTEC, Noordwijk NL, 1997Conference paper (Refereed)
  • 15.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndest elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndest elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Stenmark, Lars
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Bakke, T
    Mukherjee, S
    Cold gas thrusters micromachined in silicon and design plan1997In: ESTEC, Noordwijk, The Netherlands, Oct 15-17, 1997Conference paper (Refereed)
  • 16.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Jonsson, Kerstin
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Greek, Staffan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Materialvetenskap. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Stenmark, Lars
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Weibull fracture probability for silicon wafer bond evaluation1999In: 5th International Symposium Semicond. Wafer Bonding, Honolulu, 1999Conference paper (Refereed)
  • 17.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Jonsson, Kerstin
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Jönsson, Mats
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Stenmark, Lars
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Space qualification of direct bonded silicon microsystems1999In: Micro Nano Technology for Space Applications, Pasadena, Calif., USA, 1999Conference paper (Refereed)
  • 18.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Vallin, Örjan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Silicon fusion bond interfaces resilient to wet anisotropic etchants2000In: Micromechanics Europe 2000, Uppsala, 2000, p. 142-145Conference paper (Refereed)
  • 19.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Vallin, Örjan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Silicon fusion bond interfaces resilient to wet anisotropic etchants2001In: Journal of Micromechanics and Microengineering, Vol. 11, p. 359-363Article in journal (Refereed)
  • 20.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Vallin, Örjan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Etching through Si-Si direct bonded interfaces1997In: MME´97, 1997Conference paper (Refereed)
  • 21.
    Köhler, Johan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Wallin, Örjan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Etching through Si-Si direct bonded interfaces1997In: MME' 97, 1997Conference paper (Refereed)
  • 22.
    Ljungberg, Karin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Söderbärg, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bergh, M
    Andersson, M O
    Bengtsson, Stefan
    The effects of HF-cleaning prior to silicon wafer bonding1995In: Journal of the Electrochemical Society, ISSN 0013-4651, E-ISSN 1945-7111, Vol. 142, no 4, p. 1297-1303Article in journal (Refereed)
  • 23. Lönnblad, Jens
    et al.
    Nilsson, Göran
    Uppsala University, Disciplinary Domain of Medicine and Pharmacy, Medicinska och farmaceutiska vetenskapsområdet, centrumbildningar mm, Centre for Clinical Research, County of Västmanland.
    Folke, Mia
    Hök, Bertil
    Lindén, Maria
    Bäcklund, Ylva
    Artefacts in continuous ECG recordings: provoking and preventing manoeuvres2005In: Scandinavian Cardiovascular Journal, ISSN 1401-7431, E-ISSN 1651-2006, Vol. 39, no 3, p. 167-171Article in journal (Refereed)
    Abstract [en]

    Objectives. A systematic estimation of the effects of some clinically important artefact provoking and artefact-preventing manoeuvres.

    Design. A test protocol for the evaluation of technical modifications of continuous ECG recordings was tested in 17 patients. The programme comprised ECG recordings during five artefact-provoking manoeuvres (slight shaking of the ECG cables, rotating shoulders, slight electrode touching, washing, teeth-brushing) and two simple artefact-preventing manoeuvres (taping ECG cables and covering electrodes with paper cups).

    Results. The artefact-provoking manoeuvres induced a substantial increase in artefactual ECG. The artefact-preventing manoeuvres only incompletely prevented this increase.

    Conclusion. There is a great need of technical improvements to reduce the distortion of ECG by artefacts. The test protocol developed by us exposes a broad spectrum of different categories of ECG qualities and is therefore suitable for evaluating technical improvements concerning artefactual ECG.

  • 24.
    Rangsten, Pelle
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Katardjiev, Ilia
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Backlund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation1998In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 8, no 1, p. 1-6Article in journal (Refereed)
    Abstract [en]

    The anisotropic etching behaviour of monocrystalline quartz is studied both experimentally and with computer simulations. The etch rate minima were identified as the crystal planes m, r, r(2), s and s(4). Various shapes and initial structures, both concav

  • 25.
    Rangsten, Pelle
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hedlund, Christer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Katardjiev, Ilia
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    An experimental study and simulation of anisotropic wet etching of quartz1996In: MME´96, Oct 21-22, Barcelona, Spain, 1996Conference paper (Refereed)
  • 26.
    Rangsten, Pelle
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Ribbing, Carolina
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Strandman, Carola
    Fasta tillståndets elektronik.
    Hollman, Patrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Materialvetenskap. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Hjort, Klas
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Materialvetenskap. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Lundqvist, H
    Hök, Bertil
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Smith, Leif
    Field emitting structures intended for a miniature x-ray source1999In: Transducers´99, Digest of Technical Papers Vol 1, Sendai, Japan, June 7-10, 1999, p. 208-211Conference paper (Refereed)
  • 27.
    Rangsten, Pelle
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Richard, Åse
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Decreasing the optical path length in optoelectronic module using silicon micromachining1998In: Conf. proc. Micro Mechanics Europe MME'98, 3-5 June, Ulvik, Norway, 1998, p. 92-96Conference paper (Refereed)
  • 28.
    Rangsten, Pelle
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Vallin, Örjan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hermansson, Karin
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Quartz-Quartz Bonding1997In: ECS Annual meeting, 1997Conference paper (Refereed)
  • 29.
    Rangsten, Pelle
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Vallin, Örjan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Hermansson, Karin
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Quartz-to-quartz direct bonding1999In: Journal of the Electrochemical Society, ISSN 0013-4651, E-ISSN 1945-7111, Vol. 146, no 3, p. 1104-1105Article in journal (Refereed)
    Abstract [en]

    Direct bonding of single crystalline quartz wafers is presented. By this straightforward technique, hermetical seals between quartz wafers can be formed. Nearly Z-cut (the Z-cut rotated 1 degrees 50') and AT-cut wafers bonded spontaneously at room tempera

  • 30.
    Richard, Åse
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Physical and Analytical Chemistry, Analytical Chemistry.
    Klett, Oliver
    Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Physical and Analytical Chemistry, Analytical Chemistry.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Physical and Analytical Chemistry, Analytical Chemistry.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Physical and Analytical Chemistry, Analytical Chemistry.
    Nyholm, L
    Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Physical and Analytical Chemistry, Analytical Chemistry.
    Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection using Redox Cycling1999In: Proc Int Eng Congress and Exposition, Nashville, Tenessee, Nov 14-19, 1999, 1999Conference paper (Other academic)
  • 31. Richard, Åse
    et al.
    Klett, Oliver
    Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry.
    Strandman, Carola
    Bäcklund, Ylva
    Nyholm, Leif
    Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection Using Redox Cycling1999In: MEMS-Proceedings of the ASME International Mechanical Engineering, Congress and Exposition, Vol. 1, no 1, p. 511-516Article in journal (Refereed)
  • 32.
    Richard, Åse
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Rangsten, Pelle
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Backlund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Decreasing the optical path length in an optoelectronic module using silicon micromachining1999In: JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, Vol. 9, no 2, p. 127-129Article in journal (Refereed)
    Abstract [en]

    In order to decrease the optical path length of an optoelectronic module, two ways of achieving 45 degrees silicon mirrors with trenches defining the mirror size are presented: dicing, and dry etching. The dicing was performed with a Disco DAD 361 dicing

  • 33.
    Richard, Åse
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Sundin, Kjell
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Low Temperature Anodic Bonding of a Sub-Micrometer Fabry-Perot Cavity1999In: Proc Fifth Int Symp on Semiconductor Wafer Bonding: Science, Technology and Applications, Honolulu, 17-22 Oct 1999, pp 1015, 1999, p. 1015-Conference paper (Refereed)
  • 34.
    Stenmark, Lars
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Köhler, Johan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. ÅSTC. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Larsson, K
    Simu, Urban
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Materialvetenskap. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Micro propulsion thrusters for space applications1998In: MSW´98, Micro Structure Workshop, March 25-26, Uppsala, Sweden, 1998Conference paper (Refereed)
  • 35.
    Strandman, Carola
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Backlund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Passive and fixed alignment of devices using flexible silicon elements formed by selective etching1998In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 8, no 1, p. 39-44Article in journal (Refereed)
    Abstract [en]

    Assembly systems consisting of aligning pits combined with flexible holding elements have been produced for both passive and fixed alignment of devices such as chips and optical fibres. The free-standing holding elements were fabricated in bulk silicon us

  • 36.
    Strandman, Carola
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bulk silicon holding structures for mounting of optical fibres in v-grooves1997In: J Microelectromech Syst, Vol. 6, no 1, p. 35-40Article in journal (Refereed)
    Abstract [en]

    Silicon micromachining has been used for small-scale production of sensor elements for a fibre-optic pressure sensor. Each sensor is integrated with a guide wire for insertion of catheters during balloon dilatation of constricted arteries of the heart. Th

  • 37.
    Strandman, Carola
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Fabrication of bulk silicon holding structures for mounting of optical fibres in V-grooves1995In: The SPIE conf on Micromachining and Microfabrication ´95, Oct 23-24, Austin, USA, 1995Conference paper (Refereed)
  • 38.
    Strandman, Carola
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Passive alignment and holding of devices using flexible tongues formed by selective etching1996In: MME´96, Oct 21-22, Barcelona, Spain, 1996Conference paper (Refereed)
  • 39.
    Strandman, Carola
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Gupta, Ram
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Materialvetenskap. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Analytical modelling of fibre holding elements in silicon1997In: MOEMS´97 Nov 18-21, Nara, Japan, 1997Conference paper (Refereed)
  • 40.
    Strandman, Carola
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Rosengren, Lars
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Elderstig, H G A
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Fabrication of 45 Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon1995In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 4, no 4, p. 213-219Article in journal (Refereed)
  • 41.
    Vallin, Örjan
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafers2000In: J Micromech Microeng, Vol. 10, p. 196-199Article in journal (Refereed)
  • 42.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Backlund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    A lateral symmetrically bistable buckled beam1998In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 8, no 1, p. 29-32Article in journal (Refereed)
    Abstract [en]

    We have micromachined a lateral symmetrically bistable buckled beam for snap-in holding structures by oxidizing released beams micromachined on thick silicon-on-insulator wafers. The wafers were prepared by bonding and chemical mechanical polishing, and t

  • 43.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    A lateral symmetrically bistable buckled beam1996In: MME´96, Oct 21-22. Barcelona, Spain, 1996Conference paper (Refereed)
  • 44.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Investigation of the etch behaviour around the <111> etch minima1998In: Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998Conference paper (Refereed)
  • 45.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Terracing of (100) Si with one mask and one etching step using misaligned V-grooves1996In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 6, no 1, p. 39-42Article in journal (Refereed)
  • 46.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Karlsson, S
    Backlund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Low cost micromachined mirrors for display systems1999In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 9, no 1, p. 85-88Article in journal (Refereed)
    Abstract [en]

    A concept for the fabrication of low cost resonant scanning miners using standard microstructure technology is proposed. To demonstrate the process a mirror device for a head mounted display system was designed and fabricated. The mirror was successfully

  • 47.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Karlsson, Staffan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    A large micromachined resonant scanning mirror1998In: MSW´98 (Micro Structure Workshop), 25-26 March, Uppsala Sweden, 1998Conference paper (Refereed)
  • 48.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Karlsson, Staffan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Low cost micromachined mirrors for display systems1998In: MME'98 (Micro Mechanics Europe), June 3-5 1998, Ulvang, Norway, 1998Conference paper (Refereed)
  • 49.
    Vangbo, Mattias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Strandman, Carola
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Bäcklund, Ylva
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science. Fasta tillståndets elektronik. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Electronics.
    Terracing of (100)-Si with one mask and one etching step using misaligned V-grooves1995In: Proc of the 6th Micromechanics Europé Workshop MME´95, Copenhagen, Denmark, 3-5 Sept, 1995Conference paper (Refereed)
  • 50.
    Öjefors, E
    et al.
    SIGNALS AND SYSTEMS. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science.
    Lindblom, J
    Rydberg, A
    Kurup, DG
    Bäcklund, Ylva
    Municio, F
    Ryhanen, T
    Scheck, HO
    High gain micromachined slot-coupled patch-antenna for 60 GHz WLAN application2000In: 8th COST 260 Meeting on Smart Antenna Computer Aided Design & Technology, Université de Rennes, France, 2000Conference paper (Other academic)
12 1 - 50 of 51
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