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  • 1.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Miniature Plasma Sources for High-Precision Molecular Spectroscopy in Planetary Exploration2015Doktoravhandling, med artikler (Annet vitenskapelig)
    Abstract [en]

    The prospect of finding life outside Earth has fascinated mankind for ages, and new technology continuously pushes the boundary of how remote and how obscure evidence we can find. Employing smaller, or completely new, types of landers and robots, and equipping them with miniature instruments would indeed revolutionize exploration of other planets and moons.

    In this thesis, microsystems technology is used to create a miniature high-precision isotope-resolving molecular spectrometer utilizing the optogalvanic effect. The heart of the instrument, as well as this thesis, is a microplasma source.

    The plasma source is a split-ring resonator, chosen for its simplicity, pressure range and easily accessible plasma, and modified to fit the challenging application, e.g., by the adding of an additional ground plane for improved electromagnetic shielding, and the integration of microscopic plasma probes to extract the pristine optogalvanic signal.

    Plasma sources of this kind have been manufactured in both printed circuit board and alumina, the latter for its chemical inertness and for compatibility with other devices in a total analysis system. From previous studies, classical optogalvanic spectroscopy (OGS), although being very sensitive, is known to suffer from stability and reproducibility issues. In this thesis several studies were conducted to investigate and improve these shortcomings, and to improve the signal-to-noise ratio. Moreover, extensive work was put into understanding the underlying physics of the technique.

    The plasma sources developed here, are the first ever miniature devices to be used in OGS, and exhibits several benefits compared to traditional solutions. Furthermore, it has been confirmed that OGS scales well with miniaturization. For example, the signal strength does not decrease as the volume is reduced like in regular absorption spectroscopy. Moreover, the stability and reproducibility are greatly increased, in some cases as much as by two orders of magnitude, compared with recent studies made on a classical OGS setup. The signal-to-noise ratio has also been greatly improved, e.g., by enclosing the sample cell and by biasing the plasma. Another benefit of a miniature sample cell is the miniscule amount of sample it requires, which can be important in many applications where only small amounts of sample are available.

    To conclude: With this work, an important step toward a miniature, yet highly performing, instrument for detection of extraterrestrial life, has been taken.

    Delarbeid
    1. Operation characteristics and optical emission distribution of a miniaturized silicon through-substrate split-ring resonator microplasma source
    Åpne denne publikasjonen i ny fane eller vindu >>Operation characteristics and optical emission distribution of a miniaturized silicon through-substrate split-ring resonator microplasma source
    2014 (engelsk)Inngår i: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 23, nr 6, s. 1340-1345Artikkel i tidsskrift (Fagfellevurdert) Published
    Abstract [en]

    There are many new microplasma sources being developed for a wide variety of applications, each with different properties tailored to its specific use. Microplasma sources enable portable instruments for, e.g., chemical analysis, sterilization, or activation of substances. A novel microplasma source, based on a microstrip split-ring resonator design with electrodes integrated in its silicon substrate, was designed, manufactured, and evaluated. This device has a plasma discharge gap with a controlled volume and geometry, and offers straightforward integration with other microelectromechancial systems (MEMS) components, e.g., microfluidics. The realized device was resonant at around 2.9 GHz with a quality factor of 18.7. Two different operational modes were observed with the plasma at high pressure being confined in the gap between the electrodes, whereas the plasma at low pressures appeared between the ends of the electrodes on the backside. Measurement of the angular distribution of light emitted from the device with through-substrate electrodes showed narrow emission lobes compared with a reference plasma source with on-substrate electrodes.

    HSV kategori
    Identifikatorer
    urn:nbn:se:uu:diva-239111 (URN)10.1109/JMEMS.2014.2312849 (DOI)000345851100010 ()
    Tilgjengelig fra: 2015-01-05 Laget: 2014-12-18 Sist oppdatert: 2017-12-05bibliografisk kontrollert
    2. Evaluation of a microplasma source based on a stripline split-ring resonator
    Åpne denne publikasjonen i ny fane eller vindu >>Evaluation of a microplasma source based on a stripline split-ring resonator
    2013 (engelsk)Inngår i: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 22, nr 5, s. 055017-Artikkel i tidsskrift (Fagfellevurdert) Published
    Abstract [en]

    In this paper, a stripline split-ring resonator microwave-induced plasma source, aimed for integration in complex systems, is presented and compared with a traditional microstrip design. Devices based on the two designs are evaluated using a plasma breakdown test setup for measuring the power required to ignite plasmas at different pressures. Moreover, the radiation efficiency of the devices is investigated with a Wheeler cap, and their electromagnetic compatibility is investigated in a variable electrical environment emulating an application. Finally, the basic properties of the plasma in the two designs are investigated in terms of electron temperature, plasma potential and ion density. The study shows that, with a minor increase in plasma ignition power, the stripline design provides a more isolated and easy-to-integrate alternative to the conventional microstrip design. Moreover, the stripline devices showed a decreased antenna efficiency as compared with their microstrip counterparts, which is beneficial for plasma sources. Furthermore, the investigated stripline devices exhibited virtually no frequency shift in a varying electromagnetic environment, whereas the resonance frequency of their microstrip counterparts shifted up to 17.5%. With regard to the plasma parameters, the different designs showed only minor differences in electron temperature, whereas the ion density was higher with the stripline design.

    sted, utgiver, år, opplag, sider
    Institute of Physics (IOP), 2013
    Emneord
    Split-ring resonator, Microwave plasma, Microstrip, Stripline, Plasma, Wheeler cap, Langmuir probe
    HSV kategori
    Forskningsprogram
    Teknisk fysik med inriktning mot mikrosystemteknik; Teknisk fysik med inriktning mot mikrovågsteknik
    Identifikatorer
    urn:nbn:se:uu:diva-206792 (URN)10.1088/0963-0252/22/5/055017 (DOI)000325246400017 ()
    Tilgjengelig fra: 2013-09-04 Laget: 2013-09-04 Sist oppdatert: 2017-12-06bibliografisk kontrollert
    3. Microplasma source for optogalvanic spectroscopy of nanogram samples
    Åpne denne publikasjonen i ny fane eller vindu >>Microplasma source for optogalvanic spectroscopy of nanogram samples
    2013 (engelsk)Inngår i: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 114, nr 3, s. 033302-Artikkel i tidsskrift (Fagfellevurdert) Published
    Abstract [en]

    The demand for analysis of smaller samples in isotopic ratio measurements of rare isotopes is continuously rising with the development of new applications, particularly in biomedicine. Interesting in this aspect are methods based on optogalvanic spectroscopy, which have been reported to facilitate both 13C-to-12C and 14C-to-12C ratio measurements with high sensitivity. These methods also facilitate analysis of very small samples, down to the microgram range, which makes them very competitive to other technologies, e.g., accelerator mass spectroscopy. However, there exists a demand for moving beyond the microgram range, especially from regenerative medicine, where samples consist of, e.g., DNA, and, hence, the total sample amount is extremely small. Making optogalvanic spectroscopy of carbon isotopes applicable to such small samples, requires miniaturization of the key component of the system, namely the plasma source, in which the sample is ionized before analysis. In this paper, a novel design of such a microplasma source based on a stripline split-ring resonator is presented and evaluated in a basic optogalvanic spectrometer. The investigations focus on the capability of the plasma source to measure the optogalvanic signal in general, and the effect of different system and device specific parameters on the amplitude and stability of the optogalvanic signal in particular. Different sources of noise and instabilities are identified, and methods of mitigating these issues are discussed. Finally, the ability of the cell to handle analysis of samples down to the nanogram range is investigated, pinpointing the great prospects of stripline split-ring resonators in optogalvanic spectroscopy.

    sted, utgiver, år, opplag, sider
    American Institute of Physics (AIP), 2013
    Emneord
    nanostructured materials, optogalvanic spectroscopy, plasma instability, plasma probes, plasma sources, strip line resonators
    HSV kategori
    Forskningsprogram
    Teknisk fysik med inriktning mot mikrosystemteknik; Teknisk fysik med inriktning mot jonfysik; Teknisk fysik med inriktning mot mikrovågsteknik
    Identifikatorer
    urn:nbn:se:uu:diva-204156 (URN)10.1063/1.4813414 (DOI)000322202700014 ()
    Tilgjengelig fra: 2013-07-22 Laget: 2013-07-22 Sist oppdatert: 2017-12-06bibliografisk kontrollert
    4. Stripline split-ring resonator with integrated optogalvanic sample cell
    Åpne denne publikasjonen i ny fane eller vindu >>Stripline split-ring resonator with integrated optogalvanic sample cell
    Vise andre…
    2014 (engelsk)Inngår i: Laser Physics Letters, ISSN 1612-2011, Vol. 11, nr 4, s. 045701-Artikkel i tidsskrift, Letter (Fagfellevurdert) Published
    Abstract [en]

    Intracavity optogalvanic spectroscopy (ICOGS) has been proposed as a method for unambiguous detection of rare isotopes. Of particular interest is 14C, where detection of extremely low concentrations in the 1:1015 range (14C:12C), is of interest in, e.g., radiocarbon dating and pharmaceutical sciences. However, recent reports show that ICOGS suffers from substantial problems with reproducibility. To qualify ICOGS as an analytical method, more stable and reliable plasma generation and signal detection are needed. In our proposed setup, critical parameters have been improved. We have utilized a stripline split-ring resonator microwave-induced microplasma source to excite and sustain the plasma. Such a microplasma source offers several advantages over conventional ICOGS plasma sources. For example, the stripline split-ring resonator concept employs separated plasma generation and signal detection, which enables sensitive detection at stable plasma conditions. The concept also permits in situ observation of the discharge conditions, which was found to improve reproducibility. Unique to the stripline split-ring resonator microplasma source of in this study, is that the optogalvanic sample cell has been embedded in the device itself. This integration enabled improved temperature control and more stable and accurate signal detection. Significant improvements are demonstrated, including reproducibility, signal-to-noise ratio and precision.

    sted, utgiver, år, opplag, sider
    Institute of Physics (IOP), 2014
    Emneord
    Optogalvanic spectroscopy, Laser-assisted ratio analyzer, Split-ring resonator, microwave-induced microplasma source
    HSV kategori
    Forskningsprogram
    Fysik; Teknisk fysik med inriktning mot mikrosystemteknik
    Identifikatorer
    urn:nbn:se:uu:diva-218769 (URN)10.1088/1612-2011/11/4/045701 (DOI)000332768800011 ()
    Forskningsfinansiär
    Swedish Research Council, A0442201
    Tilgjengelig fra: 2014-02-17 Laget: 2014-02-17 Sist oppdatert: 2015-05-12bibliografisk kontrollert
    5. Improved optogalvanic detection with voltage biased Langmuir probes
    Åpne denne publikasjonen i ny fane eller vindu >>Improved optogalvanic detection with voltage biased Langmuir probes
    2014 (engelsk)Inngår i: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 116, nr 24, s. 243301-Artikkel i tidsskrift (Fagfellevurdert) Published
    Abstract [en]

    Optogalvanic detectors show great potential for infrared spectroscopy, especially in cavity enhanced techniques where they, in contrast to ordinary absorption detectors, can perform intracavity measurements. This enables them to utilize the signal-to-noise ratio improvement gained from the extended effective path length inside an optical cavity, without losing signal strength due to the limited amount of light exiting through the rear mirror. However, if optogalvanic detectors are to become truly competitive, their intrinsic sensitivity and stability has to be improved. This, in turn, requires a better understanding of the mechanisms behind the generation of the optogalvanic signal. The study presented here focuses on an optogalvanic detector based on a miniaturized stripline split-ring resonator plasma source equipped with Langmuir probes for detecting the optogalvanic signal. In particular, the effect of applying a constant bias voltage to one of the probes is investigated, both with respect to the sensitivity and stability, and to the mechanism behind the generation of the signal. Experiments with different bias voltages at different pressures and gas composition have been conducted. In particular, two different gas compositions (pure CO2 and 0.25% CO2 in 99.75% N-2) at six different pressures (100 Pa to 600 Pa) have been studied. It has been shown that probe biasing effectively improves the performance of the detector, by increasing the amplitude of the signal linearly over one order of magnitude, and the stability by about 40% compared with previous studies. Furthermore, it has been shown that relatively straightforward plasma theory can be applied to interpret the mechanism behind the generation of the signal, although additional mechanisms, such as rovibrational excitation from electron-molecule collisions, become apparent in CO2 plasmas with electron energies in the 1-6 eV range. With the achieved performance improvement and the more solid theoretical framework presented here, stripline split-ring resonator optogalvanic detectors can evolve into a compact, inexpensive, and easy-to-operate alternative for future infrared spectrometers. (C) 2014 AIP Publishing LLC.

    HSV kategori
    Identifikatorer
    urn:nbn:se:uu:diva-242865 (URN)10.1063/1.4904964 (DOI)000347164300003 ()
    Tilgjengelig fra: 2015-02-04 Laget: 2015-02-02 Sist oppdatert: 2017-12-05bibliografisk kontrollert
    6. Evaluation of dielectric properties of HTCC alumina for realization of plasma sources
    Åpne denne publikasjonen i ny fane eller vindu >>Evaluation of dielectric properties of HTCC alumina for realization of plasma sources
    2015 (engelsk)Inngår i: Journal of Electronic Materials, ISSN 0361-5235, E-ISSN 1543-186X, Vol. 44, nr 10, s. 3654-3660Artikkel i tidsskrift (Fagfellevurdert) Published
    Abstract [en]

    As the sensitivity of optogalvanic spectroscopy based on prototype microplasma sources increases, contamination from composite materials in the printed circuit board used starts to become a concern. In this paper, a transfer to high-temperature cofired alumina and platinum is made and evaluated. The high-purity alumina provides an inert plasma environment, and allows for temperatures above 1000A degrees C, which is beneficial for future integration of a combustor. To facilitate the design of high-end plasma sources, characterization of the radio frequency (RF) parameters of the materials around 2.6 GHz is carried out. A RF resonator structure was fabricated in both microstrip and stripline configurations. These resonators were geometrically and electrically characterized, and epsilon (r) and tan were calculated using the RF waveguide design tool Wcalc. The resulting epsilon (r) for the microstrip and stripline was found to be 10.68 (+/- 0.12) and 9.65 (+/- 0.14), respectively. The average tan of all devices was found to be 0.0011 (+/- 0.0007). With these parameters, a series of proof-of-concept plasma sources were fabricated and evaluated. Some problems in the fabrication stemmed from the lamination and difficulties with the screen-printing, but a functioning plasma source was demonstrated.

    HSV kategori
    Forskningsprogram
    Teknisk fysik med inriktning mot mikrosystemteknik
    Identifikatorer
    urn:nbn:se:uu:diva-251300 (URN)10.1007/s11664-015-3901-7 (DOI)000360672900061 ()
    Forskningsfinansiär
    Swedish National Space BoardKnut and Alice Wallenberg Foundation
    Tilgjengelig fra: 2015-04-15 Laget: 2015-04-15 Sist oppdatert: 2017-12-04bibliografisk kontrollert
    7. Manufacturing Miniature Langmuir probes by Fusing Platinum Bond Wires
    Åpne denne publikasjonen i ny fane eller vindu >>Manufacturing Miniature Langmuir probes by Fusing Platinum Bond Wires
    2015 (engelsk)Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, nr 10, artikkel-id 105012Artikkel i tidsskrift (Fagfellevurdert) Published
    Abstract [en]

    This paper reports on a novel method for manufacturing microscopic Langmuir probes with spherical tips from platinum bond wires for plasma characterization in microplasma sources by fusing. Here, the resulting endpoints, formed by droplets of a fused wire, are intended to act as a spherical Langmuir probe. For studying the fusing behavior, bond wires were wedge-bonded over a 2 mm wide slit, to emulate the final application, and fused at different currents and voltages. For electrical isolation, a set of wires were coated with a 4 µm thick layer of Parylene before they were fused. After fusing, the gap size, as well as the shape and area of the ends of the remaining stubs were measured. The yield of the process was also investigated, and the fusing event was studied using a high-speed camera for analyzing the dynamics of fusing. Four characteristic tip shapes were observed: spherical, semi-spherical, serpentine shaped and folded. The stub length leveled out at ~420µm. The fusing of the coated wires required a higher power for attaining a spherical shape. Finally, a Parylene coated bond wire was integrated into a stripline split-ring resonator (SSRR) microplasma source, and fused to form two Langmuir probes with spherical endpoints. These probes were used for measuring the I-V characteristics of a plasma generated by the SSRR. In a voltage range between -60 V and 60 V, the fused stubs exhibited the expected behavior of spherical Langmuir probes and will be considered for future integration.

    Emneord
    Langmuir probe; bond wire; fusing; microplasma source
    HSV kategori
    Forskningsprogram
    Teknisk fysik med inriktning mot mikrosystemteknik
    Identifikatorer
    urn:nbn:se:uu:diva-251306 (URN)10.1088/0960-1317/25/10/105012 (DOI)000366827400028 ()
    Forskningsfinansiär
    Swedish National Space BoardKnut and Alice Wallenberg Foundation
    Tilgjengelig fra: 2015-04-15 Laget: 2015-04-15 Sist oppdatert: 2018-08-03bibliografisk kontrollert
  • 2.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Gruden, Mathias
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Fasta tillståndets elektronik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik. Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Evaluation of a microplasma source based on a stripline split-ring resonator2013Inngår i: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 22, nr 5, s. 055017-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    In this paper, a stripline split-ring resonator microwave-induced plasma source, aimed for integration in complex systems, is presented and compared with a traditional microstrip design. Devices based on the two designs are evaluated using a plasma breakdown test setup for measuring the power required to ignite plasmas at different pressures. Moreover, the radiation efficiency of the devices is investigated with a Wheeler cap, and their electromagnetic compatibility is investigated in a variable electrical environment emulating an application. Finally, the basic properties of the plasma in the two designs are investigated in terms of electron temperature, plasma potential and ion density. The study shows that, with a minor increase in plasma ignition power, the stripline design provides a more isolated and easy-to-integrate alternative to the conventional microstrip design. Moreover, the stripline devices showed a decreased antenna efficiency as compared with their microstrip counterparts, which is beneficial for plasma sources. Furthermore, the investigated stripline devices exhibited virtually no frequency shift in a varying electromagnetic environment, whereas the resonance frequency of their microstrip counterparts shifted up to 17.5%. With regard to the plasma parameters, the different designs showed only minor differences in electron temperature, whereas the ion density was higher with the stripline design.

  • 3.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Khaji, Zahra
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Klintberg, Lena
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Sturesson, Peter
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC). Swedish Def Univ, Dept Mil Studies, Stockholm, Sweden.
    Söderberg Breivik, Johan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples – key components and a first integration attempt2016Inngår i: 27th Micromechanics And Microsystems Europe Workshop (MME 2016) / [ed] IOP, Institute of Physics (IOP), 2016, Vol. 757, artikkel-id 012029Konferansepaper (Fagfellevurdert)
    Abstract [en]

    This is a short summary of the authors’ recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.

  • 4.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Palmer, Kristoffer
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Lotfi, Sara
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Fasta tillståndets elektronik.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Dynamic characterization and modelling of a dual-axis beam steering device for performance understanding, optimization, and control design2013Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, nr 4, s. 045020-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    This paper presents a lumped thermal model of a dual-axis laser micromirror device for beam steering in a free-space optical (FSO) communication system, designed for fractionated spacecraft. An FSO communication system provides several advantages, such as larger bandwidth, smaller size and weight of the communication payload and less power consumption. A dual-axis mirror device is designed and realized using microelectromechanical systems technology. The fabrication is based on a double-sided, bulk micromachining process, where the mirror actuates thermally by joints consisting of v-grooves filled with the SU-8 polymer. The size of the device, consisting of a mirror, which is deflectable versus its frame in one direction, and through deflection of the frame in the other, is 15.4 × 10.4 × 0.3 mm3. In order to further characterize and understand the micromirror device, a Simulink state-space model of the actuator is set up using thermal and mechanical properties from a realized actuator. A deviation of less than 2% between the modelled and measured devices was obtained in an actuating temperature range of 20–200 °C. The model of the physical device was examined by evaluating its performance in vacuum, and by changing physical parameters, such as thickness and material composition. By this, design parameters were evaluated for performance gain and usability. For example, the crosstalk between the two actuators deflecting the mirror along its two axes in atmospheric pressure is projected to go down from 97% to 6% when changing the frame material from silicon to silicon dioxide. A feedback control system was also designed around the model in order to examine the possibility to make a robust control system for the physical device. In conclusion, the model of the actuator presented in this paper can be used for further understanding and development of the actuator system.

  • 5.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Microfluidics integrable plasma source powered by a silicon through-substrate split-ring resonator2013Inngår i: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013, s. 2608-2611Konferansepaper (Annet vitenskapelig)
    Abstract [en]

    A novel microplasma source, based on a microstrip split-ring resonator design with electrodes integrated in its silicon substrate, was designed, manufactured and evaluated. This device should offer straightforward integration with other MEMS components, and has a plasma discharge gap with a controlled volume and geometry, with potential for microfluidics. Two realized devices were resonant at around 2.9 GHz with quality factors of 26.6 and 18.7. Two different plasma ignition modes were observed, where the plasma at low pressures was not confined to the gap but rather appeared between the ends of the electrodes on the backside.

  • 6.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    A High-Performance Microplasma Source for Highly Sensitive and Robust Gas Analysis2014Inngår i: Proc. of Micronano System Workshop 2014, Uppsala, Sweden, May 15-16, 2014, 2014Konferansepaper (Annet vitenskapelig)
  • 7.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Evaluation of dielectric properties of HTCC alumina for realization of plasma sources2015Inngår i: Journal of Electronic Materials, ISSN 0361-5235, E-ISSN 1543-186X, Vol. 44, nr 10, s. 3654-3660Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    As the sensitivity of optogalvanic spectroscopy based on prototype microplasma sources increases, contamination from composite materials in the printed circuit board used starts to become a concern. In this paper, a transfer to high-temperature cofired alumina and platinum is made and evaluated. The high-purity alumina provides an inert plasma environment, and allows for temperatures above 1000A degrees C, which is beneficial for future integration of a combustor. To facilitate the design of high-end plasma sources, characterization of the radio frequency (RF) parameters of the materials around 2.6 GHz is carried out. A RF resonator structure was fabricated in both microstrip and stripline configurations. These resonators were geometrically and electrically characterized, and epsilon (r) and tan were calculated using the RF waveguide design tool Wcalc. The resulting epsilon (r) for the microstrip and stripline was found to be 10.68 (+/- 0.12) and 9.65 (+/- 0.14), respectively. The average tan of all devices was found to be 0.0011 (+/- 0.0007). With these parameters, a series of proof-of-concept plasma sources were fabricated and evaluated. Some problems in the fabrication stemmed from the lamination and difficulties with the screen-printing, but a functioning plasma source was demonstrated.

  • 8.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Tillämpad materialvetenskap.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Tillämpad materialvetenskap.
    Operation characteristics and optical emission distribution of a miniaturized silicon through-substrate split-ring resonator microplasma source2014Inngår i: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 23, nr 6, s. 1340-1345Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    There are many new microplasma sources being developed for a wide variety of applications, each with different properties tailored to its specific use. Microplasma sources enable portable instruments for, e.g., chemical analysis, sterilization, or activation of substances. A novel microplasma source, based on a microstrip split-ring resonator design with electrodes integrated in its silicon substrate, was designed, manufactured, and evaluated. This device has a plasma discharge gap with a controlled volume and geometry, and offers straightforward integration with other microelectromechancial systems (MEMS) components, e.g., microfluidics. The realized device was resonant at around 2.9 GHz with a quality factor of 18.7. Two different operational modes were observed with the plasma at high pressure being confined in the gap between the electrodes, whereas the plasma at low pressures appeared between the ends of the electrodes on the backside. Measurement of the angular distribution of light emitted from the device with through-substrate electrodes showed narrow emission lobes compared with a reference plasma source with on-substrate electrodes.

  • 9.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Sturesson, Peter
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik. Swedish Defence University.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Manufacturing Miniature Langmuir probes by Fusing Platinum Bond Wires2015Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, nr 10, artikkel-id 105012Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    This paper reports on a novel method for manufacturing microscopic Langmuir probes with spherical tips from platinum bond wires for plasma characterization in microplasma sources by fusing. Here, the resulting endpoints, formed by droplets of a fused wire, are intended to act as a spherical Langmuir probe. For studying the fusing behavior, bond wires were wedge-bonded over a 2 mm wide slit, to emulate the final application, and fused at different currents and voltages. For electrical isolation, a set of wires were coated with a 4 µm thick layer of Parylene before they were fused. After fusing, the gap size, as well as the shape and area of the ends of the remaining stubs were measured. The yield of the process was also investigated, and the fusing event was studied using a high-speed camera for analyzing the dynamics of fusing. Four characteristic tip shapes were observed: spherical, semi-spherical, serpentine shaped and folded. The stub length leveled out at ~420µm. The fusing of the coated wires required a higher power for attaining a spherical shape. Finally, a Parylene coated bond wire was integrated into a stripline split-ring resonator (SSRR) microplasma source, and fused to form two Langmuir probes with spherical endpoints. These probes were used for measuring the I-V characteristics of a plasma generated by the SSRR. In a voltage range between -60 V and 60 V, the fused stubs exhibited the expected behavior of spherical Langmuir probes and will be considered for future integration.

  • 10.
    Berglund, Martin
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi. Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Microplasma source for optogalvanic spectroscopy of nanogram samples2013Inngår i: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 114, nr 3, s. 033302-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    The demand for analysis of smaller samples in isotopic ratio measurements of rare isotopes is continuously rising with the development of new applications, particularly in biomedicine. Interesting in this aspect are methods based on optogalvanic spectroscopy, which have been reported to facilitate both 13C-to-12C and 14C-to-12C ratio measurements with high sensitivity. These methods also facilitate analysis of very small samples, down to the microgram range, which makes them very competitive to other technologies, e.g., accelerator mass spectroscopy. However, there exists a demand for moving beyond the microgram range, especially from regenerative medicine, where samples consist of, e.g., DNA, and, hence, the total sample amount is extremely small. Making optogalvanic spectroscopy of carbon isotopes applicable to such small samples, requires miniaturization of the key component of the system, namely the plasma source, in which the sample is ionized before analysis. In this paper, a novel design of such a microplasma source based on a stripline split-ring resonator is presented and evaluated in a basic optogalvanic spectrometer. The investigations focus on the capability of the plasma source to measure the optogalvanic signal in general, and the effect of different system and device specific parameters on the amplitude and stability of the optogalvanic signal in particular. Different sources of noise and instabilities are identified, and methods of mitigating these issues are discussed. Finally, the ability of the cell to handle analysis of samples down to the nanogram range is investigated, pinpointing the great prospects of stripline split-ring resonators in optogalvanic spectroscopy.

  • 11.
    Brown, P.
    et al.
    Imperial Coll London, Blackett Lab, London, England.
    Auster, U.
    TU Braunschweig, Braunschweig, Germany.
    Bergman, Jan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutet för rymdfysik, Uppsalaavdelningen.
    Fredriksson, Jesper
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutet för rymdfysik, Uppsalaavdelningen.
    Kasaba, Y.
    Tohoku Univ, Sendai, Miyagi, Japan.
    Mansour, M.
    Ecole Polytech, Lab Phys Plasmas, Palaiseau, France.
    Pollinger, A.
    Austrian Acad Sci, Space Res Inst, Vienna, Austria.
    Baughen, R.
    Imperial Coll London, Blackett Lab, London, England.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutet för rymdfysik, Uppsalaavdelningen.
    Hercik, D.
    TU Braunschweig, Braunschweig, Germany.
    Misawa, H.
    Tohoku Univ, Sendai, Miyagi, Japan.
    Retino, A.
    Ecole Polytech, Lab Phys Plasmas, Palaiseau, France.
    Bendyk, M.
    Imperial Coll London, Blackett Lab, London, England.
    Magnes, W.
    Austrian Acad Sci, Space Res Inst, Vienna, Austria.
    Cecconi, B.
    Observ Paris, LESIA, Meudon, France.
    Dougherty, M. K.
    Imperial Coll London, Blackett Lab, London, England.
    Fischer, G.
    Austrian Acad Sci, Space Res Inst, Vienna, Austria.
    Meeting the Magnetic Emc Challenges for the In-Situ Field Measurements on the Juice Mission2019Inngår i: Proceedings of 2019 ESA Workshop on Aerospace EMC (Aerospace EMC), IEEE, 2019Konferansepaper (Fagfellevurdert)
    Abstract [en]

    The JUICE (JUpiter ICy moon Explorer) mission features instrument designs tailored to meet the specific challenges of the respective measuring environment, including EMC constraints. We describe the magnetic field science requirements for this mission and show how they drive the EMC requirements on the spacecraft and selected in-situ instrument configurations. We describe the results of two mutual interference campaigns and discuss the design mitigations employed in order to realise in-situ magnetic and electric field data in-flight with the accuracy required to meet very challenging mission science goals.

  • 12. Gurgurewicz, Joanna
    et al.
    Mège, Daniel
    Grygorczuk, Jerzy
    Wiśniewski, Łukasz
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Carrère, Véronique
    Gritsevich, Maria
    Kalarus, Maciej
    Peltoniemi, Jouni
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Rataj, Mirosław
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Wawer, Piotr
    Zubko, Nataliya
    Studying the composition of Phobos' surface using HOPTER (Highland Terrain Hopper)2016Konferansepaper (Fagfellevurdert)
  • 13.
    Jonsson, Jonas
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Nguyen, Hugo
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    A compact projection system enabling topographical measurements for a miniaturized submersible explorer2011Inngår i: Proceedings of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2011, IEEE conference proceedings, 2011, s. 2518-2521Konferansepaper (Fagfellevurdert)
    Abstract [en]

    To enable photogrammetry of underwater images using a miniaturized submersible explorer, a compact projection system has been developed. By registering the deformation of a known projected pattern, using a laser and a diffractive optical element (DOE), the distance to, shape and size of an object can be calculated. The DOE has been designed, using in-house developed software, and manufactured using microstructure technology. Distances to objects 45 to 30 cm away were determined to within 0.5 cm, and the developed GUI was able to recreate the shape from the measurements for easier examination of the object.

  • 14.
    Jonsson, Jonas
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Nguyen, Hugo
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    A compact system to extract topography information from scenes viewed by a miniaturized submersible explorer2012Inngår i: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 188, nr SI, s. 401-410Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    In images taken underwater, it is generally difficult to correctly extract distances and geometric informationof objects. Different techniques, collectively referred to as photogrammetry, exist to measurefeatures in images. One of these is to project a reference pattern onto an object in a scene viewed by acamera, and register the distortion of this pattern, to calculate the shape of, and distance to, that object.This method is implemented here on a miniaturized submersible explorer equipped with, among manyother instruments, a camera. Diffractive optical elements (DOEs) have been designed and manufacturedusing microsystems technology, to, together with a laser diode, camera, and in-house developed software,provide a compact system for projecting reference patterns and analyzing their deformations. Thesystem has been characterized by measuring the distances and angles of objects in a water tank, andattempting to reproduce their shapes. The range of operation of the system, verified to be at least onemeter, is limited by the compact mounting in the small submersible and the cameras’ performance.The system was found to work well under turbid conditions as well as in water containing larger particles.Together with a vehicle-mounted camera, the compact and low-power DOE laser projection systemenables topographical measurement.

  • 15.
    Jonsson, Jonas
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Sundqvist, Johan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Nguyen, Hugo
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Ogden, Sam
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Palmer, Kristoffer
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Smedfors, Katarina
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Johansson, Linda
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Hjort, Klas
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Instrumentation and vehicle platform of a miniaturized submersible for exploration of terrestrial and extraterrestrial aqueous environments2012Inngår i: Acta Astronautica, ISSN 0094-5765, E-ISSN 1879-2030, Vol. 79, s. 203-211Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    An example of an extraterrestrial environment likely to support life is the vast liquid body believed to hide underneath the frozen crust of Jupiter's moon Europa. The hypothetical exploration of this, as well as the more accessible subglacial lakes on Earth, has been used as model applications for the development of a heavily miniaturized, yet qualified, submersible with the potential to be deployable either in itself through a long and narrow borehole or as the daughter craft of an ice-penetrating cryobot.

    Onboard the submersible, which is only 20 cm in length and 5 cm in diameter, accommodation of a versatile set of sensors and instruments capable of characterizing and imaging the surroundings, and even collecting water samples with microorganisms for return, is facilitated through the use of miniaturization technologies. For instance, together with a small camera, a laser-based, microoptic device enables the 3-D reconstruction of imaged objects for topographical measurements. As a complement, when the water is turbid or a longer range is wanted, the world's smallest side-scanning sonar, exhibiting centimeter resolution and a range of over 30 m, has been developed. The work on miniaturizing a CTD, which is a widely employed oceanographic instrument used to measure and correlate conductivity, temperature, and depth, has commenced. Furthermore, a device employing acoustics to trap microscopic particles and organisms, and, by this, enrich water samples, is under development. To ensure that the gathered samples are pristine until analyzed at the end of a mission, the device is equipped with high-pressure, latchable valves.

    Remote operation and transfer of measurement data and images, or even live streaming of video, is made possible through a kilometer-long fiber optic cable being reeled out from the vehicle underway and tethering it to a terminal. To extend the missions, the same fiber shall also be capable of charging the onboard batteries.

    In this paper, the vehicle and its subsystems are summarized. Subsystems essential for the vehicle's operation, e.g., hull structure, communication and power management, are treated separately from those of more mission-specific nature, like the instruments mentioned above.

  • 16.
    Jonsson, Jonas
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Sundqvist, Johan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Nguyen, Hugo
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Ogden, Sam
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Palmer, Kristoffer
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Smedfors, Katarina
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Wagner, Sven
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Hjort, Klas
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Miniaturized submersible for exploration of aqueous environments on Earth and beyond2011Konferansepaper (Fagfellevurdert)
    Abstract [en]

    Some of the most likely environments to support extraterrestrial life in our solar system are the ice-covered moons, suchas Europa, thought to harbor a liquid ocean underneath its frozen crust. Exploration, however, necessitates an ice-penetratingcryobot, or a long and narrow borehole, and the subsequent deployment of a small submersible, a hydrobot, with severe sizerestrictions imposed on its scientific payload. As a stepping stone for exploration of such environments, a small instrumentladenedsubmersible vehicle is currently under development.Employment of a large set of instruments capable of characterizing the aqueous environment, imaging the surroundingsand collecting microorganisms is essential for the determination of habitability. Despite the submersible being only 20 cm inlength and 5 cm in diameter, a high degree of functionality is facilitated here through the use of miniaturization technologies. Forinstance, a compact laser-illuminated diffractive optical element, paired with a high-resolution camera, enable photogrammetryand the reconstruction of objects’ shapes in 3-D space. Also for imaging, the world’s smallest side-scanning sonar has beendeveloped to acoustically image, either where water is too turbid for the camera, or where longer range is necessary. Currently,the sonar exhibits centimeter resolution and ranges over 30 meters. On the sensor side, a most vital oceanographic instrument, theCTD, used to measure the conductivity, temperature, and depth of water, has been heavily miniaturized and preliminaryevaluated. Additionally, a water sampler combining integrated selection and enriching capabilities to filter out and accommodate,e.g., microbes in the size range of 1-10 μm, is under development. Among other parts, its high-pressure valves and microfluidicacoustic traps have already been realized.For remote operation and upload of measurement data or images, or even live streaming of video, the submersible will betethered with a bi-directionally transmitting fiber optic cable, also capable of charging the onboard batteries for long missions.The one kilometer long fiber will be fitted within the hull, and by reeling out the fiber from the submersible, drag will be reduced.Herein, test results and images of the vehicle and its complete, and continuously developed, subsystems are presented.The vehicle, and its subsystems as stand-alone instruments, will enable the exploration of previously unreachable analogenvironments on Earth, vital to the field of astrobiology, and act as a forerunner to a submersible hydrobot that can explore icecoveredoceans elsewhere in our solar system.

  • 17.
    Jonsson, Jonas
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Sundqvist, Johan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Nguyen, Hugo
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Ogden, Sam
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Palmer, Kristoffer
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Smedfors, Katarina
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Wagner, Sven
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Miniaturized submersible for exploration of small aqueous environments2011Inngår i: Oceans’11 MTS/IEEE Kona, Hilton Waikoloa Village, Kona, Hawai‘i September 19-22, 2011, 2011Konferansepaper (Fagfellevurdert)
    Abstract [en]

    Remotely operated vehicles (ROVs) are commonlyused for sub-surface exploration. However, multi-functionalROVs tend to be fairly large, while preferred small and compactROVs suffer from limited functionality. The Deeper Access,Deeper Understanding (DADU) project aims to develop a smallsubmersible concept using miniaturization technologies to enablea high functionality. An operator is able to maneuver the vehiclewith five degrees of freedom using eight small thrusters, while aset of accelerometers and gyros monitor the orientation of thesubmersible. A single fiber optic cable will connect thesubmersible to a control station and enable simultaneous dataand command transfers. Rechargeable battery packs providepower to the submersibles subsystems during operation. Thesewill be rechargeable through the fiber connection. A forwardlooking camera is aided by a laser topography measurementsystem, where distances, sizes and shapes of objects in view canbe determined to within 0.5 cm. For murkier environments, orwhen a more extensive mapping of the surroundings is needed,the small high-frequency side-scanning sonar can be used.Salinity calculations of the water will be available throughmeasurements of the conductivity, temperature and depth.Samples of water and particles within it will be enabled through awater sampler with an enriching capability. Flow sensors will beable to measure the water movement around the submersible’shull. The submersible and its subsystems are under continuousdevelopment. The vehicle itself, and its subsystems as stand-aloneinstruments, will enable the exploration of previouslyunreachable submerged environments, such as the sub-glaciallakes found in Iceland and Antarctica, or other submerged smallenvironments, such as pipe and cave systems.

  • 18.
    Palmer, Kristoffer
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    A miniaturized optical communication system for microspacecraft2010Konferansepaper (Fagfellevurdert)
  • 19.
    Palmer, Kristoffer
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Lotfi, Sara
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Kratz, Henrik
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    A micromachined dual-axis beam steering actuator for use in a miniaturized optical space communication system2010Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 20, nr 10, s. 105007-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    The design, fabrication and evaluation of an electrothermally actuated micromachined beam steering device for use in a free-space optical communication system intended for use on micro-and nanospacecraft in kilometer-sized formations are presented. SU-8 confined in v-grooves is heated to create bending movement in two orthogonal directions for two-axial steering with large static bending angles and low actuation voltages. Standard MEMS processing is used to fabricate the devices with square mirror side lengths of 1, 3.5 and 5 mm. In addition, a method to prevent thermal damage to SU-8 during deep reactive ion etching has been successfully developed. Characterization shows optical scan ranges larger than 40 degrees in both directions with the maximum driving voltage of 16 V corresponding to a total power consumption of 1.14 W. Infrared imaging is used to investigate thermal cross-talk between actuators for the two scanning directions. It is found that a silicon backbone on the joint backside is crucial for device performance. Differences from expected performance are believed to arise from the SU-8 curing process and excessive heating during fabrication. A finite element method simulation is used to find the eigenfrequencies of the structures, and these are in good agreement with the measured frequency response.

  • 20.
    Persson, Anders
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Spatial distribution of the optogalvanic signal in a microplasma detector for lab-on-a-chip gas analysis2016Inngår i: Laser Physics Letters, ISSN 1612-2011, E-ISSN 1612-202X, Vol. 13, nr 7, artikkel-id 075703Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Gas sensors are characterized by their sensitivity and selectivity. This is preferably combined with versatility, where the selectivity can be altered, without complex modifications and whiteout losing sensitivity. If aimed at lab-on-a-chip applications, the sensor also must be able to analyze small samples. Today, sensors combining selectivity and versatility for chip-level gas analysis are scarce; however, this paper investigates how miniaturized optogalvanic spectroscopy can fill this gap. By studying the spatial distribution of the optogalvanic signal inside a microplasma, it is shown that the signal is generated in the minuscule gas volume of the sheath surrounding the plasma probe that collects it. Nevertheless, a strong and stable spectroscopic signal can be extracted from the sheath, and the sample concentrations can be calculated using straightforward plasma theory. The minimum detectable absorption and the noise equivalent absorption sensitivity of the system are estimated to be less than 1.4  ×  10−9 Hz−0.5 and 2.8  ×  10−9 cm−1 Hz−0.5, respectively, without cavity enhancement. Combined with inherited versatility from absorption spectroscopy and the capability of handling sub-nanogram samples, this makes optogalvanic spectrometry an excellent candidate for future lab-on-a-chip gas analyzers.

  • 21.
    Persson, Anders
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Khaji, Zahra
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Sturesson, Peter
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC). Swedish Def Univ, Div Mil Technol, Dept Mil Sci, Stockholm, Sweden.
    Söderberg, Johan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Optogalvanic spectroscopy with microplasma sources – Current status and development towards lab on a chip2016Inngår i: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 26, nr 10, artikkel-id 104003Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Miniaturized optogalvanic spectroscopy (OGS) shows excellent prospects of becoming ahighly sensitive method for gas analysis in micro total analysis systems. Here, a status reporton the current development of microwave induced microplasma sources for OGS is presented,together with the first comparison of the sensitivity of the method to conventional single-passabsorption spectroscopy. The studied microplasma sources are stripline split-ring resonators(SSRRs), with typical ring radii between 3.5 and 6 mm and operation frequencies around2.6 GHz. A linear response (R2 = 0.9999), and a stability of more than 100 s are demonstratedwhen using the microplasma source as an optogalvanic detector. Additionally, saturationeffects at laser powers higher than 100 mW are observed, and the temporal response of theplasma to periodic laser perturbation with repletion rates between 20 Hz and 200 Hz arestudied. Finally, the potential of integrating additional functionality with the detector isdiscussed, with the particular focus on a pressure sensor and a miniaturized combustor toallow for studies of solid samples.

  • 22.
    Persson, Anders
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Khaji, Zahra
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Sturesson, Peter
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Söderberg, Johan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Optogalvanic spectroscopy with microplasma sources – Current status and development towards Lab-On-A-Chip2015Konferansepaper (Fagfellevurdert)
    Abstract [en]

    Miniaturized optogalvanic spectros-copy shows excellent prospects of becoming a highly sensitive method for gas analysis in micro total analysis systems. Here, a status report on the current development of microplasma sources for optogalvan-ic spectroscopy is presented, together with the first comparison of the sensitivity of the method to con-ventional single-pass absorption spectroscopy. The stability and reproducibility of the microplasma source when used as a detector for optogalvanic spectroscopy is also investigated, and a roadmap of future developments is presented, with the particular focus of integrating sensors for measuring the pres-sure, temperature and flow of the sample gas through the detector, and combining the detector with a miniaturized combustor to allow for studies of solid samples.

  • 23.
    Persson, Anders
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Possnert, Göran
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik.
    Salehpour, Mehran
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik.
    State of the art Intracavity Optogalvanic Spectroscopy at Uppsala University2013Konferansepaper (Fagfellevurdert)
    Abstract [en]

    About five years ago, the first reports of a novel and ultrasensitive method for ro-vibrational spectroscopy of isotope ratios were published [1-3]. The method was called intracavity optogalvanic spectroscopy (ICOGS), and claimed a sensitivity and limit-of-detection (LOD) for detection of radiocarbon in the 10-15range. Applied to measuring the isotopic composition of carbon samples, ICOGS utilizes the narrow linewidth ro-vibrational absorption lines of CO2 in the long-wavelength IR spectrum, typically between 10 - 13 µm [4]. These absorption lines are strongly dependent on the isotopic composition of the CO2 molecule, where a 14CO2 line typically is separated by several hundred linewidths form the nearest 12CO2 and 13CO2 lines. In order to facilitate unambiguous detection of radiocarbon, which is typically 1010-1012 times less abundant than the isotopes 12C and 13C, the sample is moved inside the laser cavity of a 14CO2 laser. This intracavity approach has been claimed to increase the sensitivity of the detection by almost seven orders of magnitude as compared to traditional ‘extracavity’ optogalvanic spectroscopy [3]. However, despite the methodical and thorough efforts of at least five research groups worldwide, the exceptional claims regarding the sensitivity and LOD of ICOGS have not been possible to confirm.

          As the first research group to properly repeat the original experiments, we recently reported [5] serious deficiencies in the reproducibility of the original results [1-3]. We found that ICOGS in its original embodiment suffers from considerable problems with the stability and reproducibility of the optogalvanic signal, and that these uncertainties, together with mix-ups and mistakes, likely are the explanation for the extraordinary sensitivity in the original reports. An example of the irreproducibility of the original results can be seen in Fig. 1 (a) where the shape of the P20 line of 14C16O2 with different 14C concentrations is shown. As can be seen, the previously reported Voight profile-like line shape, indicating resonant absorption [3], was not found for 14C concentrations in the 10-13 ‒10-11 range, but only for samples with much higher 14C concentration. The problems with stability and reproducibility can be traced back to instabilities in the plasma source, in which the sample is partially ionized in order to extract the optogalvanic signal. The plasma sources currently used in ICOGS are based on 30 years old technology and suffer from problems with both electromagnetic interference and reproducibility in terms of the discharge conditions (pressure, temperature, etc.).

          In order to overcome these problems, we aim to deploy a completely novel kind of plasma source, based on a stripline split-ring resonator (SSRR), for ICOGS, Fig. 1 (b). We have recently published a report on the applicability of such a plasma source for ordinary optogalvanic spectroscopy [6], and now intend to optimize it for ICOGS. Based on its intrinsic properties, an SSRR could not only improve the stability of the signal, but also reduce the non-resonant background in the spectrum, and facilitate analysis of smaller samples. The latter is due to its extremely small size, with an analyzed volume in the order of 10 µl, Fig. 1 (c). In this report, we summarize our criticism towards the original publications on ICOGS, and report on the latest development regarding our efforts in the deployment of the SSRR plasma source.

  • 24.
    Persson, Anders
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik.
    Possnert, Göran
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik.
    Salehpour, Mehran
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Fysiska sektionen, Institutionen för fysik och astronomi, Tillämpad kärnfysik.
    Stripline split-ring resonator with integrated optogalvanic sample cell2014Inngår i: Laser Physics Letters, ISSN 1612-2011, Vol. 11, nr 4, s. 045701-Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Intracavity optogalvanic spectroscopy (ICOGS) has been proposed as a method for unambiguous detection of rare isotopes. Of particular interest is 14C, where detection of extremely low concentrations in the 1:1015 range (14C:12C), is of interest in, e.g., radiocarbon dating and pharmaceutical sciences. However, recent reports show that ICOGS suffers from substantial problems with reproducibility. To qualify ICOGS as an analytical method, more stable and reliable plasma generation and signal detection are needed. In our proposed setup, critical parameters have been improved. We have utilized a stripline split-ring resonator microwave-induced microplasma source to excite and sustain the plasma. Such a microplasma source offers several advantages over conventional ICOGS plasma sources. For example, the stripline split-ring resonator concept employs separated plasma generation and signal detection, which enables sensitive detection at stable plasma conditions. The concept also permits in situ observation of the discharge conditions, which was found to improve reproducibility. Unique to the stripline split-ring resonator microplasma source of in this study, is that the optogalvanic sample cell has been embedded in the device itself. This integration enabled improved temperature control and more stable and accurate signal detection. Significant improvements are demonstrated, including reproducibility, signal-to-noise ratio and precision.

  • 25.
    Snögren, Pär
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Combined pressure and flow sensor integrated in a split-ring resonator microplasma source2016Inngår i: Applied Physics Letters, ISSN 0003-6951, E-ISSN 1077-3118, Vol. 109, nr 17, artikkel-id 173508Artikkel i tidsskrift (Fagfellevurdert)
    Abstract [en]

    Monitoring and control of the principal properties of a discharge or plasma is vital in many applications, and sensors for measuring them must be integrated close to the plasma source in order to deliver reliable results. This is particularly important, and challenging, in miniaturized systems, where different compatibility issues sets the closest level of integration. In this paper, a sensor for simultaneous measurement of the pressure and flow through a stripline split-ring resonator microplasma source is presented. The sensor utilize fully integrated electrodes positioned upstream and downstream of the microplasma source to study these parameters, and was found to deliver uniform and unambiguous results in a pressure and flow range of 1-6 Torr and 1-15 sccm, respectively. Furthermore, hysteresis and drift in the measurements was found to be mitigated by introducing a resistor in parallel with the plasma, in order to facilitate discharging of the electrodes. Combined, the results show that the sensor is fully compatible with miniaturized microfluidic systems in general, and a system for optogalvanic spectroscopy in particular.

  • 26.
    Sturesson, Peter
    et al.
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC). Försvarshögskolan/Swedish National Defence College.
    Berglund, Martin
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Söderberg, Johan
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Klintberg, Lena
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Persson, Anders
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Thornell, Greger
    Uppsala universitet, Teknisk-naturvetenskapliga vetenskapsområdet, Tekniska sektionen, Institutionen för teknikvetenskaper, Mikrosystemteknik, Ångström Space Technology Centre (ÅSTC).
    Fabrication of Suspended All-Metal Sensor Elements in Ceramic Laminates2016Inngår i: Proc. of Micronano System Workshop 2016, Lund, Sweden, May 17-18, 2016, 2016Konferansepaper (Annet vitenskapelig)
    Abstract [en]

    To target a wide range of high-temperature applications [1-4], the Ångström Space Technology Centre has added High-Temperature Co-fired Ceramics, HTTC, technology to its repertoire. Usually, this technology follows a processing scheme where thin sheets of green-body ceramics are metallized through screen printing and structured by embossing, punching or milling, before they are laminated and sintered to form components. A limitation with this, is the difficulty of realizing freely suspended metal structures, which is a disadvantage in, e.g., the fabrication of calorimetric sensors or electric field probes. In this work, the embedding of platinum wires in HTCC is explored experimentally, and demonstrated for use in pressure and plasma I-V sensing.

1 - 26 of 26
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