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  • 1.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Gruden, Mathias
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Applied Nuclear Physics. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Evaluation of a microplasma source based on a stripline split-ring resonator2013In: Plasma sources science & technology (Print), ISSN 0963-0252, E-ISSN 1361-6595, Vol. 22, no 5, p. 055017-Article in journal (Refereed)
    Abstract [en]

    In this paper, a stripline split-ring resonator microwave-induced plasma source, aimed for integration in complex systems, is presented and compared with a traditional microstrip design. Devices based on the two designs are evaluated using a plasma breakdown test setup for measuring the power required to ignite plasmas at different pressures. Moreover, the radiation efficiency of the devices is investigated with a Wheeler cap, and their electromagnetic compatibility is investigated in a variable electrical environment emulating an application. Finally, the basic properties of the plasma in the two designs are investigated in terms of electron temperature, plasma potential and ion density. The study shows that, with a minor increase in plasma ignition power, the stripline design provides a more isolated and easy-to-integrate alternative to the conventional microstrip design. Moreover, the stripline devices showed a decreased antenna efficiency as compared with their microstrip counterparts, which is beneficial for plasma sources. Furthermore, the investigated stripline devices exhibited virtually no frequency shift in a varying electromagnetic environment, whereas the resonance frequency of their microstrip counterparts shifted up to 17.5%. With regard to the plasma parameters, the different designs showed only minor differences in electron temperature, whereas the ion density was higher with the stripline design.

  • 2.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
    Khaji, Zahra
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
    Klintberg, Lena
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
    Sturesson, Peter
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC). Swedish Def Univ, Dept Mil Studies, Stockholm, Sweden.
    Söderberg Breivik, Johan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology, Ångström Space Technology Centre (ÅSTC).
    Extreme-temperature lab on a chip for optogalvanic spectroscopy of ultra small samples – key components and a first integration attempt2016In: 27th Micromechanics And Microsystems Europe Workshop (MME 2016) / [ed] IOP, Institute of Physics (IOP), 2016, Vol. 757, article id 012029Conference paper (Refereed)
    Abstract [en]

    This is a short summary of the authors’ recent R&D on valves, combustors, plasma sources, and pressure and temperature sensors, realized in high-temperature co-fired ceramics, and an account for the first attempt to monolithically integrate them to form a lab on a chip for sample administration, preparation and analysis, as a stage in optogalvanic spectroscopy.

  • 3.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Palmer, Kristoffer
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Lotfi, Sara
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Dynamic characterization and modelling of a dual-axis beam steering device for performance understanding, optimization, and control design2013In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, no 4, p. 045020-Article in journal (Refereed)
    Abstract [en]

    This paper presents a lumped thermal model of a dual-axis laser micromirror device for beam steering in a free-space optical (FSO) communication system, designed for fractionated spacecraft. An FSO communication system provides several advantages, such as larger bandwidth, smaller size and weight of the communication payload and less power consumption. A dual-axis mirror device is designed and realized using microelectromechanical systems technology. The fabrication is based on a double-sided, bulk micromachining process, where the mirror actuates thermally by joints consisting of v-grooves filled with the SU-8 polymer. The size of the device, consisting of a mirror, which is deflectable versus its frame in one direction, and through deflection of the frame in the other, is 15.4 × 10.4 × 0.3 mm3. In order to further characterize and understand the micromirror device, a Simulink state-space model of the actuator is set up using thermal and mechanical properties from a realized actuator. A deviation of less than 2% between the modelled and measured devices was obtained in an actuating temperature range of 20–200 °C. The model of the physical device was examined by evaluating its performance in vacuum, and by changing physical parameters, such as thickness and material composition. By this, design parameters were evaluated for performance gain and usability. For example, the crosstalk between the two actuators deflecting the mirror along its two axes in atmospheric pressure is projected to go down from 97% to 6% when changing the frame material from silicon to silicon dioxide. A feedback control system was also designed around the model in order to examine the possibility to make a robust control system for the physical device. In conclusion, the model of the actuator presented in this paper can be used for further understanding and development of the actuator system.

  • 4.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Microfluidics integrable plasma source powered by a silicon through-substrate split-ring resonator2013In: Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII), 2013, p. 2608-2611Conference paper (Other academic)
    Abstract [en]

    A novel microplasma source, based on a microstrip split-ring resonator design with electrodes integrated in its silicon substrate, was designed, manufactured and evaluated. This device should offer straightforward integration with other MEMS components, and has a plasma discharge gap with a controlled volume and geometry, with potential for microfluidics. Two realized devices were resonant at around 2.9 GHz with quality factors of 26.6 and 18.7. Two different plasma ignition modes were observed, where the plasma at low pressures was not confined to the gap but rather appeared between the ends of the electrodes on the backside.

  • 5.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    A High-Performance Microplasma Source for Highly Sensitive and Robust Gas Analysis2014In: Proc. of Micronano System Workshop 2014, Uppsala, Sweden, May 15-16, 2014, 2014Conference paper (Other academic)
  • 6.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Evaluation of dielectric properties of HTCC alumina for realization of plasma sources2015In: Journal of Electronic Materials, ISSN 0361-5235, E-ISSN 1543-186X, Vol. 44, no 10, p. 3654-3660Article in journal (Refereed)
    Abstract [en]

    As the sensitivity of optogalvanic spectroscopy based on prototype microplasma sources increases, contamination from composite materials in the printed circuit board used starts to become a concern. In this paper, a transfer to high-temperature cofired alumina and platinum is made and evaluated. The high-purity alumina provides an inert plasma environment, and allows for temperatures above 1000A degrees C, which is beneficial for future integration of a combustor. To facilitate the design of high-end plasma sources, characterization of the radio frequency (RF) parameters of the materials around 2.6 GHz is carried out. A RF resonator structure was fabricated in both microstrip and stripline configurations. These resonators were geometrically and electrically characterized, and epsilon (r) and tan were calculated using the RF waveguide design tool Wcalc. The resulting epsilon (r) for the microstrip and stripline was found to be 10.68 (+/- 0.12) and 9.65 (+/- 0.14), respectively. The average tan of all devices was found to be 0.0011 (+/- 0.0007). With these parameters, a series of proof-of-concept plasma sources were fabricated and evaluated. Some problems in the fabrication stemmed from the lamination and difficulties with the screen-printing, but a functioning plasma source was demonstrated.

  • 7.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Applied Nuclear Physics.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Applied Materials Sciences.
    Operation characteristics and optical emission distribution of a miniaturized silicon through-substrate split-ring resonator microplasma source2014In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 23, no 6, p. 1340-1345Article in journal (Refereed)
    Abstract [en]

    There are many new microplasma sources being developed for a wide variety of applications, each with different properties tailored to its specific use. Microplasma sources enable portable instruments for, e.g., chemical analysis, sterilization, or activation of substances. A novel microplasma source, based on a microstrip split-ring resonator design with electrodes integrated in its silicon substrate, was designed, manufactured, and evaluated. This device has a plasma discharge gap with a controlled volume and geometry, and offers straightforward integration with other microelectromechancial systems (MEMS) components, e.g., microfluidics. The realized device was resonant at around 2.9 GHz with a quality factor of 18.7. Two different operational modes were observed with the plasma at high pressure being confined in the gap between the electrodes, whereas the plasma at low pressures appeared between the ends of the electrodes on the backside. Measurement of the angular distribution of light emitted from the device with through-substrate electrodes showed narrow emission lobes compared with a reference plasma source with on-substrate electrodes.

  • 8.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Sturesson, Peter
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Swedish Defence University.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Manufacturing Miniature Langmuir probes by Fusing Platinum Bond Wires2015In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 25, no 10, article id 105012Article in journal (Refereed)
    Abstract [en]

    This paper reports on a novel method for manufacturing microscopic Langmuir probes with spherical tips from platinum bond wires for plasma characterization in microplasma sources by fusing. Here, the resulting endpoints, formed by droplets of a fused wire, are intended to act as a spherical Langmuir probe. For studying the fusing behavior, bond wires were wedge-bonded over a 2 mm wide slit, to emulate the final application, and fused at different currents and voltages. For electrical isolation, a set of wires were coated with a 4 µm thick layer of Parylene before they were fused. After fusing, the gap size, as well as the shape and area of the ends of the remaining stubs were measured. The yield of the process was also investigated, and the fusing event was studied using a high-speed camera for analyzing the dynamics of fusing. Four characteristic tip shapes were observed: spherical, semi-spherical, serpentine shaped and folded. The stub length leveled out at ~420µm. The fusing of the coated wires required a higher power for attaining a spherical shape. Finally, a Parylene coated bond wire was integrated into a stripline split-ring resonator (SSRR) microplasma source, and fused to form two Langmuir probes with spherical endpoints. These probes were used for measuring the I-V characteristics of a plasma generated by the SSRR. In a voltage range between -60 V and 60 V, the fused stubs exhibited the expected behavior of spherical Langmuir probes and will be considered for future integration.

  • 9.
    Berglund, Martin
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy. Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Microplasma source for optogalvanic spectroscopy of nanogram samples2013In: Journal of Applied Physics, ISSN 0021-8979, E-ISSN 1089-7550, Vol. 114, no 3, p. 033302-Article in journal (Refereed)
    Abstract [en]

    The demand for analysis of smaller samples in isotopic ratio measurements of rare isotopes is continuously rising with the development of new applications, particularly in biomedicine. Interesting in this aspect are methods based on optogalvanic spectroscopy, which have been reported to facilitate both 13C-to-12C and 14C-to-12C ratio measurements with high sensitivity. These methods also facilitate analysis of very small samples, down to the microgram range, which makes them very competitive to other technologies, e.g., accelerator mass spectroscopy. However, there exists a demand for moving beyond the microgram range, especially from regenerative medicine, where samples consist of, e.g., DNA, and, hence, the total sample amount is extremely small. Making optogalvanic spectroscopy of carbon isotopes applicable to such small samples, requires miniaturization of the key component of the system, namely the plasma source, in which the sample is ionized before analysis. In this paper, a novel design of such a microplasma source based on a stripline split-ring resonator is presented and evaluated in a basic optogalvanic spectrometer. The investigations focus on the capability of the plasma source to measure the optogalvanic signal in general, and the effect of different system and device specific parameters on the amplitude and stability of the optogalvanic signal in particular. Different sources of noise and instabilities are identified, and methods of mitigating these issues are discussed. Finally, the ability of the cell to handle analysis of samples down to the nanogram range is investigated, pinpointing the great prospects of stripline split-ring resonators in optogalvanic spectroscopy.

  • 10.
    Boden, Roger
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Materialvetenskap.
    Simu, U.
    Margell, J.
    Lehto, Marcus
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science. Materialvetenskap.
    Hjort, Klas
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Materialvetenskap.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Materialvetenskap.
    Schweitz, Jan-Åke
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology. Materialvetenskap.
    Metallic high-pressure microfluidicpump with active valves2007Conference paper (Refereed)
  • 11.
    Bodén, Roger
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Lehto, Marcus
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Simu, Urban
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Hjort, Klas
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Schweitz, Jan-Åke
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    A polymeric paraffin actuated high-pressure micropump2006In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 127, no 1, p. 88-93Article in journal (Refereed)
  • 12.
    Bodén, Roger
    et al.
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Lehto, Marcus
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Simu, Urban
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Thornell, Greger
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Hjort, Klas
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Schweitz, Jan-Åke
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    A Polymeric Paraffin Micropump with Active Valves for High-Pressure Microfluidics2005In: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Seoul, Korea, 2005Conference paper (Refereed)
  • 13.
    Bodén, Roger
    et al.
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Lehto, Marcus
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Thornell, Greger
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Hjort, Klas
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    Schweitz, Jan-Åke
    Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Technology, Department of Engineering Sciences. Uppsala University, Teknisk-naturvetenskapliga vetenskapsområdet, Physics, Department of Physics and Materials Science, Materials Science.
    A polymeric paraffin actuated high-pressure micropump2005In: SenArticle in journal (Refereed)
  • 14.
    Böhnke, Tobias
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Division for Electricity and Lightning Research.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Micro Structural Technology.
    Hultåker, Annette
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
    Köhler, Johan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Division for Electricity and Lightning Research.
    Edoff, Marika
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Electronics.
    Roos, Arne
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
    Ribbing, Carl-Gustaf
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Solid State Physics.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Micro Structural Technology.
    Surfaces with high solar reflectance and high thermal emittance on structured silicon for spacecraft thermal control2008In: Optical materials (Amsterdam), ISSN 0925-3467, E-ISSN 1873-1252, Vol. 30, no 9, p. 1410-1421Article in journal (Refereed)
    Abstract [en]

    Presented here is an examination of unstructured and structured (by anisotropic etching), monocrystalline silicon wafers coated with sputter deposited aluminum and chemical vapor deposited silicon dioxide for high solar reflectance and high thermal emittance, respectively. The topography of the samples was characterized with optical and scanning electron microscopy. Optical properties were examined with reflectance and transmittance spectroscopy, partly by usage of an integrating sphere. The measurement results were used to estimate the equilibrium temperature of the surfaces in space. The suitability of the surfaces with high solar reflectance and high thermal emittance to aid in the thermal control of miniaturized, highly integrated components for space applications is discussed. A silicon dioxide layer on a metal layer results in a slightly lower reflectance when compared to surfaces with only a metal layer, but might be beneficial for miniaturized space components and modules that have to dissipate internally generated heat into open space. Additionally, it is an advantage to microstructure the emitting surface for enhanced radiation of excess heat.

  • 15. Gurgurewicz, Joanna
    et al.
    Mège, Daniel
    Grygorczuk, Jerzy
    Wiśniewski, Łukasz
    Berglund, Martin
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Carrère, Véronique
    Gritsevich, Maria
    Kalarus, Maciej
    Peltoniemi, Jouni
    Persson, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Rataj, Mirosław
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Wawer, Piotr
    Zubko, Nataliya
    Studying the composition of Phobos' surface using HOPTER (Highland Terrain Hopper)2016Conference paper (Refereed)
  • 16.
    Gustafsson, Theres
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Linvall, Anders
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Lindegren, Robert
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    A cost and lead time astimation tool for MEMS manufacturing2006Conference paper (Refereed)
  • 17. Gustafsson, Theres
    et al.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Materials Science.
    Manufacturing Cost and Lead Time Calculation Applied to Highly Miniaturized Systems in Space2006Conference paper (Refereed)
  • 18. Janhunen, P.
    et al.
    Toivanen, P. K.
    Polkko, J.
    Merikallio, S.
    Salminen, P.
    Haeggstrom, E.
    Seppänen, H.
    Kurppa, R.
    Ukkonen, J.
    Kiprich, S.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Richter, L.
    Krömer, O.
    Rosta, R.
    Noorma, M.
    Envall, J.
    Lätt, S.
    Mengali, G.
    Quarta, A. A.
    Koivisto, H.
    Tarvainen, O.
    Kalvas, T.
    Kauppinen, J.
    Nuottajärvi, A.
    Obraztsov, A.
    Invited Article: Electric solar wind sail: Toward test missions2010In: Review of Scientific Instruments, ISSN 0034-6748, E-ISSN 1089-7623, Vol. 81, no 11, p. 111301-Article in journal (Refereed)
    Abstract [en]

    The electric solar wind sail (E-sail) is a space propulsion concept that uses the natural solar wind dynamic pressure for producing spacecraft thrust. In its baseline form, the E-sail consists of a number of long, thin, conducting, and centrifugally stretched tethers, which are kept in a high positive potential by an onboard electron gun. The concept gains its efficiency from the fact that the effective sail area, i.e., the potential structure of the tethers, can be millions of times larger than the physical area of the thin tethers wires, which offsets the fact that the dynamic pressure of the solar wind is very weak. Indeed, according to the most recent published estimates, an E-sail of 1 N thrust and 100 kg mass could be built in the rather near future, providing a revolutionary level of propulsive performance (specific acceleration) for travel in the solar system. Here we give a review of the ongoing technical development work of the E-sail, covering tether construction, overall mechanical design alternatives, guidance and navigation strategies, and dynamical and orbital simulations.

  • 19. Janhunen, P.
    et al.
    Toivanen, P.K.
    Polkko, J.
    Merikallio, S.
    Salminen, P.
    Haeggström, E.
    Seppänen, H.
    Kurppa, R.
    Ukkonen, J.
    Kiprich, S.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Kratz, Henrik
    Richter, L.
    Krömer, O.
    Roste, R.
    Noorma, M.
    Envall, J.
    Lätt, S.
    Mengali, G.
    Quarta, A.
    Koivisto, H.
    Tarvainen, O.
    Kalvas, T.
    Kauppinen, J.
    Nuottajärvi, A.
    Obraztsov, A.
    Electric solar wind sail in.scpace propulsion status report2010In: Proceedings of Space Propulsion, 2010, San Sebastian, Spain, May 3-6, 2010, 2010Conference paper (Refereed)
  • 20.
    Janhunen, Pekka
    et al.
    Finnish Meteorological Institute.
    Merikallio, Sini
    Finnish Meteorological Institute.
    Toivanen, Petri
    Finnish Meteorological Institute.
    Polkko, Jouni
    Finnish Meteorological Institute.
    Haeggström, Edward
    University of Helsinki, Department of Physics.
    Seppänen, Henri
    University of Helsinki, Department of Physics.
    Kurppa, Ristp
    University of Helsinki, Department of Physics.
    Ukkonen, Jukka
    University of Helsinki, Department of Physics.
    Ylitalo, Tuomo
    University of Helsinki, Department of Physics.
    Kiprich, Sergiy
    National Science Center Kharkov Institute of Physics and Technology.
    Koivisto, Hannu
    University of Jyväskylä, Accelerator Laboratory.
    Kalvas, Taneli
    University of Jyväskylä, Accelerator Laboratory.
    Tarvainen, Olli
    University of Jyväskylä, Accelerator Laboratory.
    Kauppinen, Janne
    University of Jyväskylä, Accelerator Laboratory.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Sundqvist, Johan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Grönland, Tor-Arne
    Johansson, Håkan
    Rangsten, Pelle
    Vinterhav, Emil
    Noorma, Mart
    University of Tartu.
    Envall, Jouni
    University of Tartu.
    Lätt, Silver
    University of Tartu.
    Allik, Viljo
    University of Tartu.
    Voormansik, Kaupo
    University of Tartu.
    Kvell, Urmas
    Lebreton, Jean-Pierre
    Hallikainen, Martti
    Aalto University.
    Praks, Jaan
    Aalto University.
    Krömer, Olaf
    Rosta, Roland
    Salminen, Pekka
    Mengali, Giovanni
    University of Pisa.
    Quarta, Alessandro
    University of Pisa.
    Aliasi, Generoso
    University of Pisa.
    Marcuccio, Salvo
    Pergola, Pierpaolo
    Giusti, Nicola
    Electric Solar Wind Sail in tailwind2011In: EPSC-DPS Joint Meeting 2011, 2011Conference paper (Refereed)
    Abstract [en]

    The Electric Solar Wind Sail (E-sail) is a novelpropulsion concept that enables faster space travel tomany solar system targets. E-sail uses charged solarwind particles as the source of its propulsion. This isachieved by deploying long, conducting and chargedtethers, which get pushed by the solar wind byCoulomb drag [1].E-sail technology is being developed to technicalreadiness level (TRL) 4-5 by the European Union’sSeventh Framework Programme for Research andTechnological Development, EU FP7, in a projectnamed ESAIL (http://www.electric-sailing.fi/fp7).Prototypes of the key parts are to be produced. Thedesign will be scalable so that a real solar winddemonstration mission could be scaled up from them.We review here the latest results of the constantlyevolving E-sail project.

  • 21.
    Janhunen, Pekka
    et al.
    Finnish Meteorological Institute.
    Toivanen, Petri
    Finnish Meteorological Institute.
    Merikallio, Sini
    Finnish Meteorological Institute.
    Polkko, Jouni
    Finnish Meteorological Institute.
    Haeggström, Edward
    University of Helsinki, Department of Physics.
    Seppänen, Henri
    University of Helsinki, Department of Physics.
    Kurppa, Risto
    University of Helsinki, Department of Physics.
    Ukkonen, Jukka
    University of Helsinki, Department of Physics.
    Ylitalo, Tuomo
    University of Helsinki, Department of Physics.
    Kiprich, Sergiy
    National Science Center Kharkov Institute of Physics and Technology.
    Koivisto, Hannu
    University of Jyväskylä, Accelerator Laboratory.
    Kalvas, Taneli
    University of Jyväskylä, Accelerator Laboratory.
    Tarvainen, Olli
    University of Jyväskylä, Accelerator Laboratory.
    Kauppinen, Janne
    University of Jyväskylä, Accelerator Laboratory.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Sundqvist, Johan
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Grönland, Tor-Arne
    Johansson, Håkan
    Rangsten, Pelle
    Vinterhav, Emil
    Noorma, Mart
    University of Tartu.
    Envall, Jouni
    University of Tartu.
    Lätt, Silver
    University of Tartu.
    Allik, Viljo
    University of Tartu.
    Voormansik, Kaupo
    University of Tartu.
    Kvell, Urmas
    Lebreton, Jean-Pierre
    Hallikainen, Martti
    Aalto University.
    Praks, Jaan
    Aalto University.
    Krömer, Olaf
    Rosta, Roland
    Salminen, Pekka
    Mengali, Giovanni
    University of Pisa.
    Quarta, Alessandro
    University of Pisa.
    Aliasi, Generoso
    University of Pisa.
    Marcuccio, Salvo
    Pergola, Pierpaolo
    Giusti, Nicola
    Electric Solar Wind Sail Propulsion System Development2011In: International Electric Propulsion Conference, 2011Conference paper (Refereed)
  • 22.
    Jonsson, Jonas
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Berglund, Martin
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Nguyen, Hugo
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    A compact projection system enabling topographical measurements for a miniaturized submersible explorer2011In: Proceedings of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2011, IEEE conference proceedings, 2011, p. 2518-2521Conference paper (Refereed)
    Abstract [en]

    To enable photogrammetry of underwater images using a miniaturized submersible explorer, a compact projection system has been developed. By registering the deformation of a known projected pattern, using a laser and a diffractive optical element (DOE), the distance to, shape and size of an object can be calculated. The DOE has been designed, using in-house developed software, and manufactured using microstructure technology. Distances to objects 45 to 30 cm away were determined to within 0.5 cm, and the developed GUI was able to recreate the shape from the measurements for easier examination of the object.

  • 23.
    Jonsson, Jonas
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Berglund, Martin
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Nguyen, Hugo
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    A compact system to extract topography information from scenes viewed by a miniaturized submersible explorer2012In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 188, no SI, p. 401-410Article in journal (Refereed)
    Abstract [en]

    In images taken underwater, it is generally difficult to correctly extract distances and geometric informationof objects. Different techniques, collectively referred to as photogrammetry, exist to measurefeatures in images. One of these is to project a reference pattern onto an object in a scene viewed by acamera, and register the distortion of this pattern, to calculate the shape of, and distance to, that object.This method is implemented here on a miniaturized submersible explorer equipped with, among manyother instruments, a camera. Diffractive optical elements (DOEs) have been designed and manufacturedusing microsystems technology, to, together with a laser diode, camera, and in-house developed software,provide a compact system for projecting reference patterns and analyzing their deformations. Thesystem has been characterized by measuring the distances and angles of objects in a water tank, andattempting to reproduce their shapes. The range of operation of the system, verified to be at least onemeter, is limited by the compact mounting in the small submersible and the cameras’ performance.The system was found to work well under turbid conditions as well as in water containing larger particles.Together with a vehicle-mounted camera, the compact and low-power DOE laser projection systemenables topographical measurement.

  • 24.
    Jonsson, Jonas
    et al.
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Edqvist, Erik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Kratz, Henrik
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Almqvist, Monica
    Electrical Measurements, Lund University.
    Thornell, Greger
    Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Engineering Sciences, Microsystems Technology.
    Simulation and Evaluation of Small High-Frequency Side Scan Sonars Using COMSOL2009In: COMSOL Conference 2009 Milan, 2009Conference paper (Other academic)