Open this publication in new window or tab >>Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Physical Chemistry. Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Chemistry - Ångström, Inorganic Chemistry.
Sorbonne Univ, Inst NanoSci Paris, INSP, CNRS, F-75005 Paris, France..
Sorbonne Univ, Inst NanoSci Paris, INSP, CNRS, F-75005 Paris, France..
Sorbonne Univ, Inst NanoSci Paris, INSP, CNRS, F-75005 Paris, France..
Sorbonne Univ, Inst NanoSci Paris, INSP, CNRS, F-75005 Paris, France..
Helmholtz Zentrum Berlin Mat & Energie GmbH, Inst Methods & Instrumentat Synchrotron Radiat Re, Albert Einstein Str 15, D-12489 Berlin, Germany.;Univ Potsdam, Inst Phys & Astron, Karl Liebknecht Str 24-25, D-14476 Potsdam, Germany..
Helmholtz Zentrum Berlin Mat & Energie GmbH, Inst Methods & Instrumentat Synchrotron Radiat Re, Albert Einstein Str 15, D-12489 Berlin, Germany..
Helmholtz Zentrum Berlin Mat & Energie GmbH, Inst Methods & Instrumentat Synchrotron Radiat Re, Albert Einstein Str 15, D-12489 Berlin, Germany.;Univ Potsdam, Inst Phys & Astron, Karl Liebknecht Str 24-25, D-14476 Potsdam, Germany..
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Materials Science and Engineering, Solid State Physics.
Uppsala University, Disciplinary Domain of Science and Technology, Physics, Department of Physics and Astronomy, Condensed Matter Physics of Energy Materials.
Uppsala University, Disciplinary Domain of Science and Technology, Technology, Department of Electrical Engineering, Solid-State Electronics.
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2022 (English)In: Nanoscale, ISSN 2040-3364, E-ISSN 2040-3372, Vol. 14, no 17, p. 6331-6338Article in journal (Refereed) Published
Abstract [en]
We demonstrate that tungsten disulphide (WS2) with thicknesses ranging from monolayer (ML) to several monolayers can be grown on SiO2/Si, Si, and Al2O3 by pulsed direct current-sputtering. The presence of high quality monolayer and multilayered WS2 on the substrates is confirmed by Raman spectroscopy since the peak separations between the A(1g)-E-2g and A(1g)-2LA vibration modes exhibit a gradual increase depending on the number of layers. X-ray diffraction confirms a textured (001) growth of WS2 films. The surface roughness measured with atomic force microscopy is between 1.5 and 3 angstrom for the ML films. The chemical composition WSx (x = 2.03 +/- 0.05) was determined from X-ray Photoelectron Spectroscopy. Transmission electron microscopy was performed on a multilayer film to show the 2D layered structure. A unique method for growing 2D layers directly by sputtering opens up the way for designing 2D materials and batch production of high-uniformity and high-quality (stochiometric, large grain sizes, flatness) WS2 films, which will advance their practical applications in various fields.
Place, publisher, year, edition, pages
Royal Society of ChemistryRoyal Society of Chemistry (RSC), 2022
National Category
Materials Chemistry
Identifiers
urn:nbn:se:uu:diva-484453 (URN)10.1039/d1nr08375a (DOI)000770085100001 ()35297938 (PubMedID)
Funder
Swedish Research Council, 2017-06816Swedish Research Council, 2014-6463Swedish Research Council, 2018-05336
2022-09-152022-09-152024-12-03Bibliographically approved