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Ordered and parallel niobium oxide nano-tubes fabricated using Atomic Layer Deposition in anodic alumina templates
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.ORCID iD: 0000-0002-7018-9617
Uppsala University, Disciplinary Domain of Science and Technology, Chemistry, Department of Materials Chemistry, Inorganic Chemistry.
2005 (English)In: Materials Research Society Symposium Proceedings, ISSN 0272-9172, E-ISSN 1946-4274, Vol. 901, p. 0901-Ra24-05.1Article in journal (Refereed) Published
Abstract [en]

Amorphous niobium oxide (Nb2O5) nano-tubes were fabricated inside anodic alumina templates using atomic layer deposition (ALD). The nanoporous templates were in-house fabricated anodic alumina membranes having an inter-pore distance of about 100 nm with pores lengths of 2 µm. The pores were parallel and well ordered in a hexagonal pattern. Atomic layer deposition was performed using gas pulses of niobium iodide (NbI5) and oxygen separated by purging pulses of argon. By employing long gas pulses (30 s) it was possible to get coherent and amorphous Nb2O5 films conformally covering the pore-walls of the alumina template. The outer diameter of the nano-tubes was tailored between 40 and 80 nm by using alumina templates with different pore sizes. By using template membranes with pores not opened in the bottom, nano-tubes with one side closed could be fabricated. Free-standing, and still parallel, nano-tubes could be obtained by selectively etching away the alumina template using phosphoric acid. Using the above mentioned procedure it was possible to fabricate unsurpassed parallel niobium oxide nano-tubes of equal length, diameter and wall-thickness, ordered in a perfect hexagonal pattern. The samples were analysed using high resolution scanning electron microscopy (HR-SEM), transmission electron microscopy (TEM), electron diffraction and x-ray fluorescence spectroscopy (XRFS).

Place, publisher, year, edition, pages
Springer, 2005. Vol. 901, p. 0901-Ra24-05.1
National Category
Inorganic Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-97308DOI: 10.1557/PROC-0901-Ra24-05Scopus ID: 2-s2.0-34249934553OAI: oai:DiVA.org:uu-97308DiVA, id: diva2:172184
Available from: 2008-05-14 Created: 2008-05-14 Last updated: 2025-04-01Bibliographically approved
In thesis
1. Metal Oxide Thin Films and Nanostructures Made by ALD
Open this publication in new window or tab >>Metal Oxide Thin Films and Nanostructures Made by ALD
2008 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Thin films of cobalt oxide, iron oxide and niobium oxide, and nanostructured thin films of iron oxide, titanium oxide and multilayered iron oxide/titanium oxide have been deposited by Atomic Layer Deposition (ALD). The metal oxides were grown using the precursor combinations CoI2/O2, Fe(Cp)2/O2, NbI5/O2 and TiI4/H2O. The samples were analysed primarily with respect to phase content, morphology and growth characteristics.

Thin films deposited on Si (100) were found to be amorphous or polycrystalline, depending on deposition temperature and the oxide deposited; cobalt oxide was also deposited on MgO (100), where it was found to grow epitaxially with orientation (001)[100]Co3O4||(001)[100]MgO. As expected, the polycrystalline films were rougher than the amorphous or the epitaxial films. The deposition processes showed properties characteristic of self-limiting ALD growth; all processes were found to have a deposition temperature independent growth region. The deposited films contained zero or only small amounts of precursor residues.

The nanostructured films were grown using anodic aluminium oxide (AAO) or carbon nanosheets as templates. Nanotubes could be manufactured by depositing a thin film which covers the pore walls of the AAO template uniformly; free-standing nanotubes retaining the structure of the template could be fabricated by removing the template. Multilayered nanotubes could be obtained by depositing multiple layers of titanium dioxide and iron oxide in the pores of the AAO template. Carbon nanosheets were used to make titanium dioxide nanosheets with a conducting graphite backbone. The nucleation of the deposited titanium dioxide could be controlled by acid treatment of the carbon nanosheets.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2008. p. 56
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 441
Keywords
Inorganic chemistry, Atomic layer deposition, Metal oxide, Nanostructures, Template deposition, Thin films, Oorganisk kemi
Identifiers
urn:nbn:se:uu:diva-8898 (URN)978-91-554-7220-7 (ISBN)
Public defence
2008-06-05, Å 2005, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 10:15
Opponent
Supervisors
Available from: 2008-05-14 Created: 2008-05-14Bibliographically approved
2. Template-Based fabrication of Nanostructured Materials
Open this publication in new window or tab >>Template-Based fabrication of Nanostructured Materials
2006 (English)Doctoral thesis, comprehensive summary (Other academic)
Abstract [en]

Materials prepared on the nanoscale often exhibit many different properties compared to the same materials in their bulk-state. Interest in nanostructured materials has increased because of these properties in fields such as microelectronics, catalysis, optics and sensors. This increased interest in nanostructured materials calls for new and more precise fabrication techniques.

This thesis describes how to use the porous anodic aluminium oxide as a template for the fabrication of a variety of nanostructured materials. Palladium and copper nanoparticles were deposited along the pore walls in anodic aluminum oxide using electroless deposition and atomic layer deposition. In both cases, it was possible to control the size of the nanoparticles by carefully monitoring the deposition parameters. The thesis also describes how Prussian blue nanoparticles and nanotubes can be fabricated using the anodic aluminium oxide as a template. The deposition of Prussian blue was performed by a sequential wet-chemical method. By using atomic layer deposition, it was also possible to deposit thin films of amorphous Nb2O5 on the pore walls. When the template was removed by etching, freestanding nanotubes were obtained. The anodic aluminium oxide membrane was also used as a mask for high energy (MeV) ion irradiation of an underlying substrate. The tracks produced were etched away with hydrogen fluoride. In this way, it was possible to transfer the highly ordered porous pattern from the mask onto other oxides such as SiO2 and TiO2.

All fabricated structures were characterized using a variety of analysis techniques: scanning electron microscopy for evaluating sample morphology; transmission electron microscopy for better resolved investigations of the morphology; X-ray diffraction to assess crystallinity; energy dispersive spectroscopy and X-ray fluorescence spectroscopy to determine the elemental composition and identify possible contaminants.

The general aim of the work described in this thesis has been to create a set of tools for use in the fabrication of a variety of nanostructured materials, whose dimensions composition can be tailored by selecting appropriate fabrication methods and parameters.

Place, publisher, year, edition, pages
Uppsala: Acta Universitatis Upsaliensis, 2006. p. 57
Series
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology, ISSN 1651-6214 ; 246
Keywords
Inorganic chemistry, Nanoparticles, nanotubes, anodic aluminium oxide, electroless deposition, ALD, Nb2O5, Prussian blue, palladium, copper, ion beam lithography, TiO2, SiO2, Oorganisk kemi
Identifiers
urn:nbn:se:uu:diva-7364 (URN)91-554-6738-5 (ISBN)
Public defence
2006-12-15, Häggsalen, Ångströmlaboratoriet, Lägerhyddsvägen 1, Uppsala, 13:30
Opponent
Supervisors
Available from: 2006-11-24 Created: 2006-11-24 Last updated: 2025-04-01Bibliographically approved

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Rooth, MårtenJohansson, AndersBoman, MatsHårsta, Anders

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