Synthesis and characterization of c-TiAlN/h-Cr2N multilayer films deposited by magnetron sputtering on Si (100) substratesShow others and affiliations
2024 (English)In: Journal of Alloys and Compounds, ISSN 0925-8388, E-ISSN 1873-4669, Vol. 976, article id 173273Article in journal (Refereed) Published
Abstract [en]
A series of c-TiAlN/ h-Cr2N multilayer films with modulation periods Lambda of 10, 20 and 30 nm and thickness ratios (Cr2N thickness /Lambda) of 25%, 50% and 75% were prepared by dc magnetron sputtering on the Si substrate. The microstructures were characterized by scanning electron microscopy, x-ray diffraction, and the mechanical properties were measured by curvature measurement method and nanoindentation. With the Cr2N ratio increasing from 25% to 75%, the orientation of Cr2N layers changed from a randomly orientation to a 0001 preferential orientation, while inversely, the c-TiAlN layer changed from a 001 preferential orientation to a 111 preferential orientation or a randomly orientation. In the meantime, and regardless of the modulation period, the lattice parameter of c-TiAlN decreased from 4.16 angstrom to 4.12 angstrom and was explained by an increase of tensile stress between + 0.2 and + 1.3 GPa when the increase of Cr2N% in the modulation. With the increase of Cr2N ratio, the morphology of the film changed and led to surface with apparent porosity and large grain sizes of 100 x 300 nm. The film with 25% Cr2N ratio and modulation period of 20 nm exhibited the highest hardness reaching 22 +/- 1.3 GPa and reduced Young's modulus of 253 +/- 6 GPa.
Place, publisher, year, edition, pages
ELSEVIER SCIENCE SA , 2024. Vol. 976, article id 173273
Keywords [en]
Multilayer film; Cubic-TiAlN; Mechanical properties; Residual stress; Cr2N
National Category
Materials Chemistry
Identifiers
URN: urn:nbn:se:uu:diva-537616DOI: 10.1016/j.jallcom.2023.173273ISI: 001149150800001OAI: oai:DiVA.org:uu-537616DiVA, id: diva2:1894603
Note
Funding Agencies|Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University [2009 00971]; Knut and Alice Wallenberg foundation through the Wallenberg Academy Fellows program [KAW-2020.0196]; Swedish Research Council (VR) [2021-03826]; Swedish Energy Agency [52740-1]; National Natural Science Foundation of China [52272065]; National Major Science and Technology Projects of China [Y2022-III-0004-0013, NP2022424]; National Major Science and Tech-nology Projects of China [202106830068]; Fundamental Research Fund for the Central Universities; China Scholarship Council (CSC) [NWK20220113]
2024-09-032024-09-032024-09-03