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We report the synthesis and structural characterization of three crystalline borylated ortho-silylaryl tri­fluoro­methane­sulfonates: 5-(4,4,5,5-tetra­methyl-1,3,2-dioxaborolan-2-yl)-2-(tri­methyl­sil­yl)phenyl tri­fluoro­methane­sulfonate, C₁₆H₂₄BF₃O₅SSi (1a), 4-(4,4,5,5-tetra­methyl-1,3,2-dioxaborolan-2-yl)-2-(tri­methyl­sil­yl)phenyl tri­fluoro­methane­sulfonate, C₁₆H₂₄BF₃O₅SSi (1b), and 2-methyl-4-(4,4,5,5-tetra­methyl-1,3,2-dioxaborolan-2-yl)-6-(tri­methyl­silyl)phen­yl tri­fluoro­methane­sulfonate, C₁₇H₂₆BF₃O₅SSi (2), which are versatile aryne precursors. For all three compounds, the heteroatom substituents are almost coplanar with the central aromatic moiety. C—heteroatom bonding metrics are unexceptional and fall withing the typical range of C—B, C—Si, and C—O single bonds. Despite numerous electronegative sites, only weak inter­molecular inter­actions are observed in the solid state.